Inventor · disambiguated record

Marce Mathijs Theodore Marie Dierichs

Also filed as: DIERICHS MARCE MATHIJS T M · DIERICHS MARCE MATHIJS THEODORE MARIE

1 granted patent·1 pending application·7 citations·filing 2004–2008

31Inventor score

Technology areasG03F

Files withASML HOLDING NV2

Top patents by PatentIndex Score

2 records

0184US7859647B2Lithographic apparatus and device manufacturing methodASML HOLDING NV·Filed 2008·Granted Dec 28, 2010·7 cites·10 claims
0241US2006138349A1Lithographic apparatus and device manufacturing methodASML HOLDING NV·Filed 2004·Application pending·0 cites

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