Inventor · disambiguated record
Martin Eickelkamp
Also filed as: EICKELKAMP MARTIN
1 granted patent·3 pending applications·0 citations·filing 2014–2021
1Inventor score
Technology areasC23C
Files withAIXTRON SE4
Top patents by PatentIndex Score
4 records- 0145US9670580B2MOCVD layer growth method with subsequent multi-stage cleaning stepAIXTRON SE·Filed 2014·Granted Jun 6, 2017·0 cites·11 claims
- 0241US2023160062A1Method for ascertaining the end of a cleaning process for a process chamber of a mocvd reactorAIXTRON SE·Filed 2021·Application pending·0 cites
- 0336US2019390336A1Transport ringAIXTRON SE·Filed 2018·Application pending·0 cites
- 0433US2023002902A1Gas inlet device for a cvd reactorAIXTRON SE·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →