Inventor · disambiguated record
Marvin Farley
Also filed as: FARLEY MARVIN
41 granted patents·8 pending applications·1,337 citations·filing 1984–2021
98Inventor score
Top patents by PatentIndex Score
49 records- 0198US6515288B1Vacuum bearing structure and a method of supporting a movable memberAPPLIED MATERIALS INC·Filed 2000·Granted Feb 4, 2003·74 cites·21 claims
- 0297US4804837AIon implantation surface charge control method and apparatusEATON CORP·Filed 1988·Granted Feb 14, 1989·99 cites·10 claims
- 0397US4539217ADose control methodEATON CORP·Filed 1984·Granted Sep 3, 1985·88 cites·4 claims
- 0496US6437351B1Method and apparatus for controlling a workpiece in a vacuum chamberAPPLIED MATERIALS INC·Filed 2000·Granted Aug 20, 2002·82 cites·7 claims
- 0595US8227768B2Low-inertia multi-axis multi-directional mechanically scanned ion implantation systemSMICK THEODORE·Filed 2009·Granted Jul 24, 2012·80 cites·35 claims
- 0695US6248642B1SIMOX using controlled water vapor for oxygen implantsIBIS TECHNOLOGY CORP·Filed 1999·Granted Jun 19, 2001·96 cites·13 claims
- 0794US6501078B1Ion extraction assemblyAPPLIED MATERIALS INC·Filed 2000·Granted Dec 31, 2002·51 cites·18 claims
- 0894US6271529B1Ion implantation with charge neutralizationEBARA CORP·Filed 1998·Granted Aug 7, 2001·116 cites·30 claims
- 0994US4587433ADose control apparatusEATON CORP·Filed 1985·Granted May 6, 1986·65 cites·2 claims
- 1092US5898179AMethod and apparatus for controlling a workpiece in a vacuum chamberORION EQUIPMENT INC·Filed 1997·Granted Apr 27, 1999·119 cites·10 claims
- 1192US4804852ATreating work pieces with electro-magnetically scanned ion beamsEATON CORP·Filed 1987·Granted Feb 14, 1989·54 cites·35 claims
- 1291US7479644B2Ion beam diagnosticsAPPLIED MATERIALS INC·Filed 2006·Granted Jan 20, 2009·17 cites·32 claims
- 1390US6870170B1Ion implant dose controlAPPLIED MATERIALS INC·Filed 2004·Granted Mar 22, 2005·36 cites·22 claims
- 1489US6555832B1Determining beam alignment in ion implantation using Rutherford Back ScatteringAPPLIED MATERIALS INC·Filed 2000·Granted Apr 29, 2003·33 cites·19 claims
- 1588US7282427B1Method of implanting a substrate and an ion implanter for performing the methodAPPLIED MATERIALS INC·Filed 2006·Granted Oct 16, 2007·11 cites·7 claims
- 1688US6908836B2Method of implanting a substrate and an ion implanter for performing the methodAPPLIED MATERIALS INC·Filed 2002·Granted Jun 21, 2005·26 cites·18 claims
- 1787US10403503B2Wafer cooling system and methodAXCELIS TECH INC·Filed 2018·Granted Sep 3, 2019·5 cites·19 claims
- 1886US6297510B1Ion implant dose controlAPPLIED MATERIALS INC·Filed 1999·Granted Oct 2, 2001·50 cites·17 claims
- 1986US6163033AMethod and apparatus for controlling a workpiece in a vacuum chamberAPPLIED MATERIALS INC·Filed 1999·Granted Dec 19, 2000·61 cites·6 claims
- 2083US8124946B2Post-decel magnetic energy filter for ion implantation systemsRYDING GEOFFREY·Filed 2009·Granted Feb 28, 2012·7 cites·14 claims
- 2180US7253424B2Method of implanting a substrate and an ion implanter for performing the methodAPPLIED MATERIALS INC·Filed 2006·Granted Aug 7, 2007·6 cites·34 claims
- 2279US9218941B2Ion implantation system and method with variable energy controlAXCELIS TECH INC·Filed 2014·Granted Dec 22, 2015·4 cites·24 claims
- 2379US6956223B2Multi-directional scanning of movable member and ion beam monitoring arrangement thereforAPPLIED MATERIALS INC·Filed 2002·Granted Oct 18, 2005·24 cites·44 claims
- 2478US6331713B1Movable ion source assemblyAPPLIED MATERIALS INC·Filed 1999·Granted Dec 18, 2001·31 cites·19 claims
- 2577US4675530ACharge density detector for beam implantationEATON CORP·Filed 1985·Granted Jun 23, 1987·33 cites·15 claims
- 2676US7582883B2Method of scanning a substrate in an ion implanterAPPLIED MATERIALS INC·Filed 2007·Granted Sep 1, 2009·3 cites·19 claims
- 2776US7235797B2Method of implanting a substrate and an ion implanter for performing the methodAPPLIED MATERIALS INC·Filed 2005·Granted Jun 26, 2007·3 cites·19 claims
- 2875US9978599B2Wafer cooling apparatus and methodAXCELIS TECH INC·Filed 2017·Granted May 22, 2018·2 cites·19 claims
- 2975US7611975B2Method of implanting a substrate and an ion implanter for performing the methodAPPLIED MATERIALS INC·Filed 2006·Granted Nov 3, 2009·5 cites·9 claims
- 3073US8168941B2Ion beam angle calibration and emittance measurement system for ribbon beamsFARLEY MARVIN·Filed 2009·Granted May 1, 2012·5 cites·16 claims
- 3173US6878946B2Indirectly heated button cathode for an ion sourceAPPLIED MATERIALS INC·Filed 2002·Granted Apr 12, 2005·11 cites·28 claims
- 3269US7049210B2Method of implanting a substrate and an ion implanter for performing the methodAPPLIED MATERIALS INC·Filed 2004·Granted May 23, 2006·11 cites·11 claims
- 3366US11244800B2Stepped indirectly heated cathode with improved shieldingAXCELIS TECH INC·Filed 2021·Granted Feb 8, 2022·0 cites·21 claims
- 3464US9842752B2Optical heat source with restricted wavelengths for process heatingBERNHARDT DAVID·Filed 2013·Granted Dec 12, 2017·2 cites·12 claims
- 3564US7872247B2Ion beam guide tubeAPPLIED MATERIALS INC·Filed 2007·Granted Jan 18, 2011·2 cites·13 claims
- 3653US6274875B1Fluid bearing vacuum seal assemblyAPPLIED MATERIALS INC·Filed 1999·Granted Aug 14, 2001·10 cites·15 claims
- 3751US11545330B2Ion source with multiple bias electrodesAXCELIS TECH INC·Filed 2021·Granted Jan 3, 2023·0 cites·20 claims
- 3851US2005191409A1Ion beam monitoring arrangementFiled 2005·Application pending·0 cites
- 3950US6268609B1Apparatus and method for reducing heating of a workpiece in ion implantationAPPLIED MATERIALS INC·Filed 1999·Granted Jul 31, 2001·8 cites·5 claims
- 4050US2011042578A1Ion beam monitoring arrangementMURRELL ADRIAN·Filed 2010·Application pending·0 cites
- 4147US2008099696A1Shaped apertures in an ion implanterAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 4246US2008169435A1Ion beam monitoring arrangementAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 4340US6989315B2SIMOX using controlled water vapor for oxygen implantsIBIS TECHNOLOGY INC·Filed 2001·Granted Jan 24, 2006·0 cites·15 claims
- 4440US2005181584A1Ion implantationAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 4539US6271530B1Apparatus for reducing distortion in fluid bearing surfacesAPPLIED MATERIALS INC·Filed 1999·Granted Aug 7, 2001·7 cites·24 claims
- 4638US2003168609A1Indirectly heated button cathode for an ion sourceFiled 2002·Application pending·0 cites
- 4737US2011291022A1Post Implant Wafer Heating Using LightLEE WILLIAM D·Filed 2010·Application pending·0 cites
- 4835US2012161037A1Dose Measurement Method using CalorimeterFARLEY MARVIN·Filed 2010·Application pending·0 cites
- 4934US9558914B2Bipolar wafer charge monitor system and ion implantation system comprising sameAXCELIS TECH INC·Filed 2015·Granted Jan 31, 2017·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →