Inventor · disambiguated record
Matthias Fetzer
Also filed as: FETZER MATTHIAS
0 granted patents·4 pending applications·0 citations·filing 2024–2025
Files withZEISS CARL SMT GMBH4
Top patents by PatentIndex Score
4 records- 0167US2025216797A1Optical element for a projection exposure system, optical system comprising same and projection exposure system comprising the optical element and/or the optical systemZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0264US2025224681A1Cooling device for cooling a position-sensitive component of a lithography systemZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0362US2024419066A1Method for incorporating temperature-regulating hollow structures into a substrate, in particular into a substrate for an optical element, method and substrate for producing an optical element, optical element, processing system and also apparatus pertaining to semiconductor technology and structured electronic componentZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0458US2024176249A1Optical element, projection optical unit and projection exposure apparatusZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →