Inventor · disambiguated record
Mark Johannes Hermanus Frencken
Also filed as: FRENCKEN MARK JOHANNES HERMANU · FRENCKEN MARK JOHANNES HERMANUS
10 granted patents·1 pending application·8 citations·filing 2005–2022
80Inventor score
Files withASML NETHERLANDS BV11
Top patents by PatentIndex Score
11 records- 0183US7330238B2Lithographic apparatus, immersion projection apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Feb 12, 2008·6 cites·19 claims
- 0277US11860546B2Fluid handling structure for lithographic apparatusASML NETHERLANDS BV·Filed 2022·Granted Jan 2, 2024·0 cites·20 claims
- 0377US10895808B2Substrate holder, a lithographic apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2016·Granted Jan 19, 2021·2 cites·19 claims
- 0470US11454892B2Fluid handling structure for lithographic apparatusASML NETHERLANDS BV·Filed 2021·Granted Sep 27, 2022·0 cites·20 claims
- 0566US11579533B2Substrate holder, a lithographic apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2021·Granted Feb 14, 2023·0 cites·20 claims
- 0657US11029607B2Fluid handling structure for lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Jun 8, 2021·0 cites·20 claims
- 0755US11860554B2Object positioner, method for correcting the shape of an object, lithographic apparatus, object inspection apparatus, device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Jan 2, 2024·0 cites·20 claims
- 0855US7859644B2Lithographic apparatus, immersion projection apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Dec 28, 2010·0 cites·20 claims
- 0951US2024411230A1A fluid extraction system, method and lithographic apparatusASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1043US11243476B2Stage apparatus, lithographic apparatus, control unit and methodASML NETHERLANDS BV·Filed 2019·Granted Feb 8, 2022·0 cites·20 claims
- 1141US9377697B2Lithographic apparatus and table for use in such an apparatusASML NETHERLANDS BV·Filed 2013·Granted Jun 28, 2016·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →