Inventor · disambiguated record
Matthew A. Fuller
Also filed as: FULLER MATTHEW · FULLER MATTHEW A · FULLER MATTHEW H
43 granted patents·31 pending applications·467 citations·filing 1993–2025
98Inventor score
Top patents by PatentIndex Score
74 records- 0195US9054144B2Porous barrier for evenly distributed purge gas in a microenvironmentBURNS JOHN·Filed 2010·Granted Jun 9, 2015·22 cites·7 claims
- 0294US11587810B2Wafer cushionENTEGRIS INC·Filed 2020·Granted Feb 21, 2023·6 cites·12 claims
- 0393US11901205B2Membrane diffuser for a substrate containerENTEGRIS INC·Filed 2023·Granted Feb 13, 2024·2 cites·9 claims
- 0493US7900776B2Wafer container with door actuated wafer restraintENTEGRIS INC·Filed 2006·Granted Mar 8, 2011·21 cites·14 claims
- 0592US7523830B2Wafer container with secondary wafer restraint systemENTEGRIS INC·Filed 2005·Granted Apr 28, 2009·21 cites·20 claims
- 0691US7866480B2Front opening substrate container with bottom plateENTEGRIS INC·Filed 2007·Granted Jan 11, 2011·16 cites·20 claims
- 0791US7857683B2CMP retaining ringENTEGRIS INC·Filed 2009·Granted Dec 28, 2010·14 cites·20 claims
- 0891US7677393B2Wafer container and door with vibration dampening latching mechanismENTEGRIS INC·Filed 2007·Granted Mar 16, 2010·16 cites·27 claims
- 0991US7422107B2Kinematic coupling with textured contact surfacesENTEGRIS INC·Filed 2006·Granted Sep 9, 2008·17 cites·16 claims
- 1089US11551957B2Purge connectors and modules for a substrate containerENTEGRIS INC·Filed 2020·Granted Jan 10, 2023·2 cites·20 claims
- 1189US10672637B2Internal purge diffuser with offset manifoldENTEGRIS INC·Filed 2016·Granted Jun 2, 2020·9 cites·20 claims
- 1289US8783463B2Wafer container with tubular environmental control componentsWATSON JAMES A·Filed 2009·Granted Jul 22, 2014·20 cites·28 claims
- 1388US9520310B2Wafer container with door interface sealENTEGRIS INC·Filed 2013·Granted Dec 13, 2016·8 cites·15 claims
- 1488US9312157B2Wafer carrierADAMS MICHAEL S·Filed 2012·Granted Apr 12, 2016·12 cites·16 claims
- 1587US11610795B2Membrane diffuser for a substrate containerENTEGRIS INC·Filed 2019·Granted Mar 21, 2023·4 cites·19 claims
- 1686US12068183B2Substrate container with door gasketENTEGRIS INC·Filed 2022·Granted Aug 20, 2024·2 cites·18 claims
- 1785US7182203B2Wafer container and door with vibration dampening latching mechanismENTEGRIS INC·Filed 2004·Granted Feb 27, 2007·29 cites·9 claims
- 1884US10475682B2Wafer support column with interlocking featuresENTEGRIS INC·Filed 2016·Granted Nov 12, 2019·6 cites·20 claims
- 1982US10734264B2Wafer container with external passive getter moduleENTEGRIS INC·Filed 2016·Granted Aug 4, 2020·4 cites·10 claims
- 2082US10173812B2Wafer container with latching mechanism for large diameter wafersENTEGRIS INC·Filed 2014·Granted Jan 8, 2019·4 cites·15 claims
- 2182US7201276B2Front opening substrate container with bottom plateENTEGRIS INC·Filed 2004·Granted Apr 10, 2007·24 cites·19 claims
- 2281US7347329B2Substrate carrierENTEGRIS INC·Filed 2004·Granted Mar 25, 2008·25 cites·14 claims
- 2381US7100772B2Wafer container with door actuated wafer restraintENTEGRIS INC·Filed 2004·Granted Sep 5, 2006·22 cites·18 claims
- 2479US7073667B2Photochromic substrate containerENTEGRIS INC·Filed 2004·Granted Jul 11, 2006·19 cites·23 claims
- 2576US10032660B2Porous barrier for evenly distributed purge gas in a microenvironmentENTEGRIS INC·Filed 2015·Granted Jul 24, 2018·2 cites·10 claims
- 2675US10723525B2Wafer container with latching mechanism for large diameter wafersENTEGRIS INC·Filed 2018·Granted Jul 28, 2020·1 cites·11 claims
- 2773US10043696B2Wafer container with tubular environmental control componentsENTEGRIS INC·Filed 2014·Granted Aug 7, 2018·2 cites·12 claims
- 2873US7316325B2Substrate containerENTEGRIS INC·Filed 2004·Granted Jan 8, 2008·15 cites·11 claims
- 2971US12322625B2Wafer container purge port assemblyENTEGRIS INC·Filed 2023·Granted Jun 3, 2025·0 cites·17 claims
- 3070US2023377925A1Purge flow distribution system for a substrate container and method for performing the sameENTEGRIS INC·Filed 2023·Application pending·0 cites
- 3170US2025273496A1Wafer container purge port assemblyENTEGRIS INC·Filed 2025·Application pending·0 cites
- 3268US10147624B2Wafer carrierENTEGRIS INC·Filed 2016·Granted Dec 4, 2018·1 cites·4 claims
- 3367US2023128154A1Purge flow distribution system for a substrate container and method for performing the sameENTEGRIS INC·Filed 2022·Application pending·0 cites
- 3464US7325693B2Wafer container and door with cam latching mechanismENTEGRIS INC·Filed 2004·Granted Feb 5, 2008·9 cites·22 claims
- 3564US2025029815A1Method and device to distribute gas into a containerENTEGRIS INC·Filed 2024·Application pending·0 cites
- 3663US12315749B2Methods of installing a purge fluid conditioning element into a semiconductor substrate carrying containerENTEGRIS INC·Filed 2022·Granted May 27, 2025·0 cites·19 claims
- 3763US11869787B2Substrate container valve assembliesENTEGRIS INC·Filed 2020·Granted Jan 9, 2024·0 cites·5 claims
- 3863US2025029858A1Method and device to distribute gas into a containerENTEGRIS INC·Filed 2024·Application pending·0 cites
- 3963US2025029857A1Module retainerENTEGRIS INC·Filed 2024·Application pending·0 cites
- 4062US2024363380A1Method and device to distribute gas into a containerENTEGRIS INC·Filed 2024·Application pending·0 cites
- 4162US2024412995A1Guided diffusion device brackets and methods for diffusion device retentionENTEGRIS INC·Filed 2024·Application pending·0 cites
- 4261US9673075B2Wafer container with door guide and sealGREGERSON BARRY·Filed 2011·Granted Jun 6, 2017·1 cites·11 claims
- 4360US7344030B2Wafer carrier with apertured door for cleaningENTEGRIS INC·Filed 2004·Granted Mar 18, 2008·7 cites·21 claims
- 4459US12354897B2Substrate container with door gasketENTEGRIS INC·Filed 2023·Granted Jul 8, 2025·0 cites·19 claims
- 4558US12394652B2Semiconductor substrate carrying container with front and rear openingsENTEGRIS INC·Filed 2022·Granted Aug 19, 2025·0 cites·17 claims
- 4658US2023411191A1Purging gas amplifierENTEGRIS INC·Filed 2023·Application pending·0 cites
- 4758US2025149363A1Methods and apparatus for purifying substrate containersENTEGRIS INC·Filed 2024·Application pending·0 cites
- 4858US2024274454A1Substrate container systems and methods of purging a substrate containerENTEGRIS INC·Filed 2024·Application pending·0 cites
- 4958US2024222172A1Substrate container with purge gas diffuserENTEGRIS INC·Filed 2023·Application pending·0 cites
- 5058US2024096671A1Substrate container systems and methods of purging a substrate containerENTEGRIS INC·Filed 2023·Application pending·0 cites
Showing the top 50 of 74 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →