Inventor · disambiguated record
Manato Furusawa
Also filed as: FURUSAWA MANATO
4 granted patents·3 pending applications·1 citations·filing 2015–2025
57Inventor score
Top patents by PatentIndex Score
7 records- 0174US2025367711A1Transfer apparatus, cleaning module, and substrate processing apparatusEBARA CORP·Filed 2025·Application pending·0 cites
- 0262US12403507B2Transfer apparatus, cleaning module, and substrate processing apparatusEBARA CORP·Filed 2021·Granted Sep 2, 2025·0 cites·10 claims
- 0361US9966245B2Cooling apparatus, illumination optical system, exposure apparatus, and method of manufacturing articleCANON KK·Filed 2015·Granted May 8, 2018·1 cites·9 claims
- 0451US2024335920A1Substrate transfer apparatus, and apparatus for processing substrate provided with substrate transfer apparatusEBARA CORP·Filed 2024·Application pending·0 cites
- 0550US2024416480A1Substrate suction member, elastic seal assembly, top ring, and substrate processing apparatusEBARA CORP·Filed 2022·Application pending·0 cites
- 0643US11701750B2Top ring for holding a substrate and substrate processing apparatusEBARA CORP·Filed 2020·Granted Jul 18, 2023·0 cites·18 claims
- 0729USD1102398SSeal for chemical mechanical polishing deviceEBARA CORP·Filed 2023·Granted Nov 18, 2025·0 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →