Inventor · disambiguated record
Marcel Haertling
Also filed as: HAERTLING MARCEL
0 granted patents·3 pending applications·0 citations·filing 2023–2025
Files withZEISS CARL SMT GMBH3
Top patents by PatentIndex Score
3 records- 0160US2025389873A1Optical element for reflection of radiation in the vuv wavelength regionZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0258US2025271783A1Method for operating an optical system, and optical systemZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0358US2024035163A1Method and apparatus for deposition of at least one layer, optical element and optical arrangementZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →