Inventor · disambiguated record
Mark Halman
Also filed as: HALMAN MARK · HALMAN MARK J
3 granted patents·182 citations·filing 1991–2004
72Inventor score
Top patents by PatentIndex Score
3 records- 0184US5269879AMethod of etching vias without sputtering of underlying electrically conductive layerLAM RES CORP·Filed 1991·Granted Dec 14, 1993·133 cites·19 claims
- 0270US5658425AMethod of etching contact openings with reduced removal rate of underlying electrically conductive titanium silicide layerLAM RES CORP·Filed 1995·Granted Aug 19, 1997·49 cites·26 claims
- 0328US6957621B1Guide for assisting sails over stanchionsHALMAN MARK J·Filed 2004·Granted Oct 25, 2005·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →