Inventor · disambiguated record
Martin L. Hammond
Also filed as: HAMMOND MARTIN L
5 granted patents·557 citations·filing 1984–2000
85Inventor score
Top patents by PatentIndex Score
5 records- 0197US6143129AInductive plasma reactorMATTSON TECH INC·Filed 1998·Granted Nov 7, 2000·374 cites·35 claims
- 0296US6551447B1Inductive plasma reactorMATTSON TECH INC·Filed 2000·Granted Apr 22, 2003·113 cites·31 claims
- 0382US4694779AReactor apparatus for semiconductor wafer processingTETRON INC·Filed 1984·Granted Sep 22, 1987·45 cites·24 claims
- 0464US6169271B1Model based method for wafer temperature control in a thermal processing system for semiconductor manufacturingMATTSON TECH INC·Filed 1999·Granted Jan 2, 2001·18 cites·22 claims
- 0544US6236023B1Cleaning process for rapid thermal processing systemMATTSON TECH INC·Filed 1999·Granted May 22, 2001·7 cites·41 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →