Inventor · disambiguated record
Masahiko Harumoto
Also filed as: HARUMOTO MASAHIKO
37 granted patents·8 pending applications·197 citations·filing 2002–2025
96Inventor score
Files withSCREEN HOLDINGS CO LTD25DAINIPPON SCREEN MFG8HARUMOTO MASAHIKO5SCREEN SEMICONDUCTOR SOLUTIONS CO LTD3SOKUDO CO LTD3
Top patents by PatentIndex Score
45 records- 0197US9375748B2Substrate processing apparatus and substrate processing methodHARUMOTO MASAHIKO·Filed 2013·Granted Jun 28, 2016·59 cites·17 claims
- 0294US8781308B2Apparatus for and method of heat-treating film formed on surface of substrateHARUMOTO MASAHIKO·Filed 2011·Granted Jul 15, 2014·6 cites·8 claims
- 0388US6692165B2Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2002·Granted Feb 17, 2004·47 cites·27 claims
- 0485US11986853B2Substrate processing apparatus, film formation unit, substrate processing method and film formation methodSCREEN HOLDINGS CO LTD·Filed 2020·Granted May 21, 2024·1 cites·11 claims
- 0582US10591820B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Mar 17, 2020·3 cites·18 claims
- 0679US6869234B2Developing apparatus and developing methodDAINIPPON SCREEN MFG·Filed 2003·Granted Mar 22, 2005·23 cites·16 claims
- 0778US11004702B2Film processing unit and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2016·Granted May 11, 2021·2 cites·13 claims
- 0876US11107698B2Substrate treating methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Aug 31, 2021·2 cites·5 claims
- 0975US10047441B2Substrate processing apparatus and substrate processing methodSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2017·Granted Aug 14, 2018·1 cites·7 claims
- 1075US6656277B2Apparatus for and method of processing substrateDAINIPPON SCREEN MFG·Filed 2002·Granted Dec 2, 2003·18 cites·7 claims
- 1174US9028621B2Substrate cleaning method and substrate cleaning deviceMIYAGI TADASHI·Filed 2011·Granted May 12, 2015·5 cites·6 claims
- 1273US8956695B2Developing methodHARUMOTO MASAHIKO·Filed 2012·Granted Feb 17, 2015·2 cites·8 claims
- 1369US10832925B2Thermal processing device, substrate processing apparatus, thermal processing method and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Nov 10, 2020·1 cites·8 claims
- 1469US6752544B2Developing apparatus and developing methodDAINIPPON SCREEN MFG·Filed 2002·Granted Jun 22, 2004·12 cites·29 claims
- 1568US12508623B2Substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2024·Granted Dec 30, 2025·0 cites·11 claims
- 1668US11243469B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Feb 8, 2022·1 cites·7 claims
- 1768US10854480B2Film processing unit, substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2016·Granted Dec 1, 2020·1 cites·12 claims
- 1868US8137576B2Substrate developing method and developing apparatusHARUMOTO MASAHIKO·Filed 2008·Granted Mar 20, 2012·2 cites·11 claims
- 1967US6749351B2Apparatus for developing substrateDAINIPPON SCREEN MFG·Filed 2002·Granted Jun 15, 2004·11 cites·14 claims
- 2063US12119242B2Film processing methodSCREEN HOLDINGS CO LTD·Filed 2021·Granted Oct 15, 2024·0 cites·15 claims
- 2159US10684548B2Developing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Jun 16, 2020·0 cites·3 claims
- 2259US9581907B2Developing apparatusSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2014·Granted Feb 28, 2017·0 cites·10 claims
- 2357US9828676B2Substrate processing apparatus and substrate processing methodSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2016·Granted Nov 28, 2017·0 cites·20 claims
- 2456US2009103960A1Developing apparatusSOKUDO CO LTD·Filed 2008·Application pending·0 cites
- 2556US2025299952A1Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2025·Application pending·0 cites
- 2652US10185219B2Developing methodSCREEN HOLDINGS CO LTD·Filed 2015·Granted Jan 22, 2019·0 cites·6 claims
- 2749US10840096B2Method for processing substrateSCREEN HOLDINGS CO LTD·Filed 2017·Granted Nov 17, 2020·0 cites·5 claims
- 2848US2018147599A1Substrate processing apparatus, film formation unit, substrate processing method and film formation methodSCREEN HOLDINGS CO LTD·Filed 2016·Application pending·0 cites
- 2947US10395942B2Etching device, substrate processing apparatus, etching method and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Aug 27, 2019·0 cites·14 claims
- 3046US10941492B2Substrate treating methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Mar 9, 2021·0 cites·20 claims
- 3146US2008090185A1Method and apparatus for rinsing a substrate during lithographic development processingSOKUDO CO LTD·Filed 2007·Application pending·0 cites
- 3246US2008090186A1Method and system for performing development processing during photolithographySOKUDO CO LTD·Filed 2007·Application pending·0 cites
- 3345US2008025823A1Load lock device, and substrate processing apparatus and substrate processing system including the sameHARUMOTO MASAHIKO·Filed 2007·Application pending·0 cites
- 3444US10539877B2Developing methodSCREEN HOLDINGS CO LTD·Filed 2019·Granted Jan 21, 2020·0 cites·7 claims
- 3543US11281108B2Exposure deviceSCREEN HOLDINGS CO LTD·Filed 2020·Granted Mar 22, 2022·0 cites·9 claims
- 3643US10955745B2Exposure device, substrate processing apparatus, exposure method and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Mar 23, 2021·0 cites·22 claims
- 3743US10754251B2Development unit, substrate processing apparatus, development method and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Aug 25, 2020·0 cites·18 claims
- 3843US10444636B2Exposure device substrate processing apparatus, exposure method of substrate and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Oct 15, 2019·0 cites·15 claims
- 3943US7597491B2Apparatus for and method of processing substrateDAINIPPON SCREEN MFG·Filed 2005·Granted Oct 6, 2009·0 cites·6 claims
- 4043US2007009839A1Pattern forming method, film forming apparatus and pattern forming apparatusDAINIPPON SCREEN MFG·Filed 2006·Application pending·0 cites
- 4141US10900126B2Substrate treating method and apparatus used thereforSCREEN HOLDINGS CO LTD·Filed 2017·Granted Jan 26, 2021·0 cites·10 claims
- 4240US10569297B2Coating methodSCREEN HOLDINGS CO LTD·Filed 2016·Granted Feb 25, 2020·0 cites·12 claims
- 4338US10401736B2Exposure device, substrate processing apparatus, exposure method of substrate and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Sep 3, 2019·0 cites·16 claims
- 4438US2004180277A1Substrate treating method and apparatusDAINIPPON SCREEN MFG·Filed 2003·Application pending·0 cites
- 4537US10331034B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2016·Granted Jun 25, 2019·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →