Inventor · disambiguated record
Masaaki Hasei
Also filed as: HASEI MASAAKI
6 granted patents·349 citations·filing 1993–2001
87Inventor score
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0192US6111225AWafer processing apparatus with a processing vessel, upper and lower separately sealed heating vessels, and means for maintaining the vessels at predetermined pressuresTOKYO ELECTRON LTD·Filed 1997·Granted Aug 29, 2000·181 cites·14 claims
- 0286US6399922B2Single-substrate-heat-treating apparatus for semiconductor process systemTOKYO ELECTRON LTD·Filed 2001·Granted Jun 4, 2002·36 cites·14 claims
- 0383US5554226AHeat treatment processing apparatus and cleaning method thereofTOKYO ELECTRON LTD·Filed 1995·Granted Sep 10, 1996·54 cites·4 claims
- 0480US6224934B1Ozone-processing apparatus for semiconductor process systemTOKYO ELECTRON LTD·Filed 2000·Granted May 1, 2001·31 cites·22 claims
- 0573US6228173B1Single-substrate-heat-treating apparatus for semiconductor process systemTOKYO ELECTRON LTD·Filed 1999·Granted May 8, 2001·38 cites·5 claims
- 0644US5427625AMethod for cleaning heat treatment processing apparatusTOKYO ELECTRON LTD·Filed 1993·Granted Jun 27, 1995·9 cites·6 claims
Join the waitlist — get patent alerts
Get an alert when Masaaki Hasei files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →