Inventor · disambiguated record
Marc Hauptmann
Also filed as: HAUPTMANN MARC
15 granted patents·6 pending applications·65 citations·filing 2001–2023
90Inventor score
Top patents by PatentIndex Score
21 records- 0190US10241418B2Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatusASML NETHERLANDS BV·Filed 2015·Granted Mar 26, 2019·9 cites·20 claims
- 0285US12044981B2Method and apparatus for optimization of lithographic processASML NETHERLANDS BV·Filed 2021·Granted Jul 23, 2024·1 cites·20 claims
- 0382US10613445B2Methods and apparatus for obtaining diagnostic information relating to a lithographic manufacturing processASML NETHERLANDS BV·Filed 2019·Granted Apr 7, 2020·3 cites·20 claims
- 0481US11782349B2Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2023·Granted Oct 10, 2023·0 cites·20 claims
- 0579US6865467B2Method of operating a vehicle transmissionLUK LAMELLEN & KUPPLUNGSBAU·Filed 2001·Granted Mar 8, 2005·17 cites·42 claims
- 0677US11592753B2Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2022·Granted Feb 28, 2023·0 cites·20 claims
- 0777US10877381B2Methods of determining corrections for a patterning processASML NETHERLANDS BV·Filed 2017·Granted Dec 29, 2020·1 cites·20 claims
- 0876US6785599B2Method of operating a vehicle transmissionLUK LAMELLEN & KUPPLUNGSBAU·Filed 2003·Granted Aug 31, 2004·17 cites·22 claims
- 0973US6722219B2Transmission, shiftable in a track patternLUK LAMELLEN & KUPPLUNGSBAU·Filed 2002·Granted Apr 20, 2004·17 cites·69 claims
- 1072US11327407B2Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted May 10, 2022·0 cites·20 claims
- 1162US2025251668A1Method of optimizing maintenance of a lithographic apparatusASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1259US12085913B2Method for generating a control scheme and device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Sep 10, 2024·0 cites·20 claims
- 1359US2025237965A1Setup and control methods for a lithographic process and associated apparatusesASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1458US11099487B2Method and apparatus for optimization of lithographic processASML NETHERLANDS BV·Filed 2018·Granted Aug 24, 2021·0 cites·21 claims
- 1549US12276919B2Method for controlling a semiconductor manufacturing processASML NETHERLANDS BV·Filed 2020·Granted Apr 15, 2025·0 cites·20 claims
- 1648US2025028254A1Methods of determining a mechanical property of a layer applied to a substrate, and associated devicesASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1745US7788009B2Transmission control system and method for compensating plant changes in a transmission control system of an automatic vehicle transmissionLUK LAMELLEN & KUPPLUNGSBAU·Filed 2007·Granted Aug 31, 2010·0 cites·23 claims
- 1841US2024231233A9Methods and apparatus for characterizing a semiconductor manufacturing processASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1940US2020050180A1Methods & apparatus for controlling an industrial processASML NETHERLANDS BV·Filed 2017·Application pending·0 cites
- 2038US2005107937A1Transmission control system and method for compensating roadway changes in a transmission control system of an automatic vehicle transmissionLUK LAMELLEN & KUPPLUNGSBAU·Filed 2004·Application pending·0 cites
- 2130US9378989B2Method and apparatus for cleaning semiconductor substratesMERTENS PAUL·Filed 2012·Granted Jun 28, 2016·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →