Inventor · disambiguated record
Marcel François Heertjes
Also filed as: HEERTJES MARCEL F · HEERTJES MARCEL FRANCOIS · HEERTJES MARCEL FRANÇOIS
14 granted patents·5 pending applications·38 citations·filing 2004–2018
88Inventor score
Files withASML NETHERLANDS BV8KONINKL PHILIPS ELECTRONICS NV4HEERTJES MARCEL FRANCOIS3BREUKERS MARCUS JOSEPH ELISABETH GODFRIED1ENVENTURE GLOBAL TECHNOLOGY1
Top patents by PatentIndex Score
19 records- 0186US7818073B2Method for obtaining improved feedforward data, a lithographic apparatus for carrying out the method and a device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Oct 19, 2010·10 cites·16 claims
- 0274US7817243B2Vibration isolation systemASML NETHERLANDS BV·Filed 2004·Granted Oct 19, 2010·13 cites·4 claims
- 0370US8825182B2Position control system, lithographic apparatus, and method to control a position of a movable objectSIMONS WILHELMUS FRANCISCUS JOHANNES·Filed 2011·Granted Sep 2, 2014·3 cites·16 claims
- 0470US8014881B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Sep 6, 2011·3 cites·27 claims
- 0565US10175587B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Jan 8, 2019·1 cites·20 claims
- 0664US8135488B2Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning deviceHEERTJES MARCEL FRANCOIS·Filed 2008·Granted Mar 13, 2012·2 cites·13 claims
- 0761US8373849B2Lithographic apparatus and control systemASML NETHERLANDS BV·Filed 2009·Granted Feb 12, 2013·1 cites·20 claims
- 0859US8279407B2Stage system and lithographic apparatus comprising such stage systemKAMIDI RAMIDIN IZAIR·Filed 2009·Granted Oct 2, 2012·1 cites·20 claims
- 0957US8675179B2Control system, lithographic apparatus and a method to control a position quantity of a control location of a movable objectHEERTJES MARCEL FRANCOIS·Filed 2010·Granted Mar 18, 2014·2 cites·24 claims
- 1057US7453228B2Method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning deviceASML NETHERLANDS BV·Filed 2006·Granted Nov 18, 2008·2 cites·16 claims
- 1153US8452442B2Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning deviceHEERTJES MARCEL FRANCOIS·Filed 2012·Granted May 28, 2013·0 cites·18 claims
- 1245US2008130435A1Disc Drive Apparatus With Non-Linear ObserverKONINKL PHILIPS ELECTRONICS NV·Filed 2006·Application pending·0 cites
- 1342US11454938B2Control system, method to increase a bandwidth of a control system, and lithographic apparatusASML NETHERLANDS BV·Filed 2018·Granted Sep 27, 2022·0 cites·15 claims
- 1442US7774287B2System and method for moving a component through a setpoint profile, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Aug 10, 2010·0 cites·14 claims
- 1541US2007070837A1Disc drive apparatusKONINKL PHILIPS ELECTRONICS NV·Filed 2004·Application pending·0 cites
- 1640US2006213362A1Lorentz motor control system for a payloadKONINKL PHILIPS ELECTRONICS NV·Filed 2004·Application pending·0 cites
- 1738US8891063B2Lithographic apparatus and device manufacturing methodBREUKERS MARCUS JOSEPH ELISABETH GODFRIED·Filed 2011·Granted Nov 18, 2014·0 cites·17 claims
- 1837US2007246934A1Protective compression and tension sleeves for threaded connections for radially expandable tubular membersENVENTURE GLOBAL TECHNOLOGY·Filed 2005·Application pending·0 cites
- 1935US2006291355A1Disc drive apparatusKONINKL PHILIPS ELECTRONICS NV·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →