Inventor · disambiguated record
Markus Holz
Also filed as: HOLZ MARKUS
16 granted patents·5 pending applications·17 citations·filing 2014–2025
87Inventor score
Top patents by PatentIndex Score
21 records- 0187US10514608B2Method for producing an illumination system for an EUV projection exposure system, and illumination systemZEISS CARL SMT GMBH·Filed 2018·Granted Dec 24, 2019·4 cites·25 claims
- 0286US10678151B2Control deviceZEISS CARL SMT GMBH·Filed 2019·Granted Jun 9, 2020·4 cites·20 claims
- 0381US10261424B2Lithography apparatus and method for operating a lithography apparatusZEISS CARL SMT GMBH·Filed 2017·Granted Apr 16, 2019·2 cites·29 claims
- 0480US10838307B2Apparatus and method for operating an apparatusZEISS CARL SMT GMBH·Filed 2019·Granted Nov 17, 2020·2 cites·20 claims
- 0574US9851555B2Optical componentZEISS CARL SMT GMBH·Filed 2016·Granted Dec 26, 2017·3 cites·20 claims
- 0674US2025314977A1Optical system and lithography systemZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0772US2025291176A1Mirror arrangement with cooled mirror elements and lithography systemZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0868US10101507B2Mirror deviceZEISS CARL SMT GMBH·Filed 2017·Granted Oct 16, 2018·1 cites·20 claims
- 0965US11370020B2Levitation melting processALD VACUUM TECHN GMBH·Filed 2019·Granted Jun 28, 2022·1 cites·16 claims
- 1064US2025370351A1System having a lithography apparatus and a number of electronics modules, and method for operating a systemZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 1162US2025258437A1Euv multi-mirror arrangementZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 1261US10843259B2Casting methodALD VACUUM TECHN GMBH·Filed 2018·Granted Nov 24, 2020·0 cites·25 claims
- 1361US2025271781A1Assembly for an optical systemZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 1459US11789367B2Facet mirror for an illumination optical unit of a projection exposure apparatusZEISS CARL SMT GMBH·Filed 2022·Granted Oct 17, 2023·0 cites·21 claims
- 1559US11048172B2Method for producing an illumination system for an EUV projection exposure system, and illumination systemZEISS CARL SMT GMBH·Filed 2019·Granted Jun 29, 2021·0 cites·22 claims
- 1654US12164102B2Method for generating a mathematical model for positioning individual mirrors of a facet mirror in an optical systemZEISS CARL SMT GMBH·Filed 2021·Granted Dec 10, 2024·0 cites·16 claims
- 1749US11102850B1Device and method for levitation melting using induction units which are arranged in a tilted mannerALD VACUUM TECHN GMBH·Filed 2019·Granted Aug 24, 2021·0 cites·17 claims
- 1847US10514619B2Sensor arrangement for a lithography system, lithography system, and method for operating a lithography systemZEISS CARL SMT GMBH·Filed 2018·Granted Dec 24, 2019·0 cites·20 claims
- 1947US9721690B2Melting device for consolidating contaminated scrapALD VACUUM TECHN GMBH·Filed 2014·Granted Aug 1, 2017·0 cites·18 claims
- 2044US10018803B2Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangementZEISS CARL SMT GMBH·Filed 2016·Granted Jul 10, 2018·0 cites·20 claims
- 2142US10007195B2Device for determining a tilt angle of at least one mirror of a lithography system, and methodZEISS CARL SMT GMBH·Filed 2016·Granted Jun 26, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →