Inventor · disambiguated record
Makoto Ishitsubo
Also filed as: ISHITSUBO MAKOTO
0 granted patents·3 pending applications·0 citations·filing 2010–2023
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0161US2024186119A1Substrate processing apparatus, plasma measurement method, and plasma regulation methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0246US2022223380A1Microwave supply mechanism, plasma treatment apparatus, and plasma treatment methodTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 0335US2012180953A1Plasma processing apparatus and wave retardation plate used thereinOZAKI SHIGENORI·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →