Inventor · disambiguated record
Masashi Kabasawa
Also filed as: KABASAWA MASASHI
3 granted patents·7 pending applications·0 citations·filing 2018–2024
39Inventor score
Files withEBARA CORP10
Top patents by PatentIndex Score
10 records- 0169US2025178158A1Substrate polishing method and substrate polishing apparatusEBARA CORP·Filed 2024·Application pending·0 cites
- 0268US2024217062A1Substrate polishing apparatus, substrate processing apparatus, method, and storage mediumEBARA CORP·Filed 2023·Application pending·0 cites
- 0368US2024217060A1Substrate polishing device, substrate processing apparatus, method, and storage mediumEBARA CORP·Filed 2023·Application pending·0 cites
- 0460US12076830B2Polishing method and polishing apparatusEBARA CORP·Filed 2023·Granted Sep 3, 2024·0 cites·3 claims
- 0560US11897080B2Polishing apparatusEBARA CORP·Filed 2020·Granted Feb 13, 2024·0 cites·13 claims
- 0658US2024359290A1Polishing method, computer-readable storage medium storing program for operating computer, and polishing apparatusEBARA CORP·Filed 2024·Application pending·0 cites
- 0755US11642751B2Polishing method and polishing apparatusEBARA CORP·Filed 2020·Granted May 9, 2023·0 cites·8 claims
- 0846US2024181594A1Polishing method, and polishing apparatusEBARA CORP·Filed 2022·Application pending·0 cites
- 0939US2019126428A1Heat exchanger for regulating temperature of polishing surface of polishing pad, polishing apparatus having such heat exchanger, polishing method for substrate using such heat exchanger, and computer-readable storage medium storing a program for regulating temperature of polishing surface of polishing padEBARA CORP·Filed 2018·Application pending·0 cites
- 1037US2019308293A1Method of regulating a surface temperature of polishing pad, and polishing apparatusEBARA CORP·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →