Inventor · disambiguated record
Makoto Karyu
Also filed as: KARYU MAKOTO
3 granted patents·0 citations·filing 2011–2014
43Inventor score
Top patents by PatentIndex Score
3 records- 0151US9507251B2Method for manufacturing reflective mask and apparatus for manufacturing reflective maskSHIBAURA MECHATRONICS CORP·Filed 2014·Granted Nov 29, 2016·0 cites·10 claims
- 0239US10111313B2Plasma processing apparatus and plasma processing methodSHIBAURA MECHATRONICS CORP·Filed 2013·Granted Oct 23, 2018·0 cites·9 claims
- 0339US8702901B2Method for manufacturing reflective mask and apparatus for manufacturing reflective maskYOSHIMORI TOMOAKI·Filed 2011·Granted Apr 22, 2014·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →