Inventor · disambiguated record
Masatomo Kita
Also filed as: KITA MASATOMO
15 granted patents·14 pending applications·12 citations·filing 2018–2025
86Inventor score
Files withTOKYO ELECTRON LTD29
Top patents by PatentIndex Score
29 records- 0193US11862506B2Substrate processing system, vacuum substrate transfer module, and substrate transfer methodTOKYO ELECTRON LTD·Filed 2021·Granted Jan 2, 2024·3 cites·7 claims
- 0292US11948816B2Transfer apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Apr 2, 2024·2 cites·11 claims
- 0391US11994234B2Gate valve and driving methodTOKYO ELECTRON LTD·Filed 2022·Granted May 28, 2024·1 cites·10 claims
- 0488US10643825B2Particle generation preventing method and vacuum apparatusTOKYO ELECTRON LTD·Filed 2018·Granted May 5, 2020·5 cites·13 claims
- 0585US12191188B2Transfer device, transfer system, and end effectorTOKYO ELECTRON LTD·Filed 2021·Granted Jan 7, 2025·1 cites·14 claims
- 0680US12476121B2Transfer apparatusTOKYO ELECTRON LTD·Filed 2024·Granted Nov 18, 2025·0 cites·20 claims
- 0775US2024309966A1Gate valve and driving methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0873US2025054793A1Substrate processing system and transfer methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0973US2025096020A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1073US2025069940A1Transfer device, transfer system, and end effectorTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1167US12165893B2Substrate processing system and transfer methodTOKYO ELECTRON LTD·Filed 2023·Granted Dec 10, 2024·0 cites·21 claims
- 1264US11955356B2Processing system and transfer methodTOKYO ELECTRON LTD·Filed 2021·Granted Apr 9, 2024·0 cites·18 claims
- 1363US12198952B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Jan 14, 2025·0 cites·6 claims
- 1462US2025364289A1Substrate processing system and trolleyTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 1561US12125738B2Storage module, substrate processing system, and method of transferring consumable memberTOKYO ELECTRON LTD·Filed 2021·Granted Oct 22, 2024·0 cites·19 claims
- 1658US2024182252A1Transfer module and transfer methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1757US12341046B2Transfer apparatus and transfer methodTOKYO ELECTRON LTD·Filed 2021·Granted Jun 24, 2025·0 cites·14 claims
- 1856US2024186158A1Transfer module and transfer methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1956US2024030011A1Substrate transfer system and transfer moduleTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 2055US2024222185A1Substrate transfer systemTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 2152US12131937B2Transfer system, transfer device, and transfer methodTOKYO ELECTRON LTD·Filed 2022·Granted Oct 29, 2024·0 cites·11 claims
- 2252US2025046583A1Substrate processing systemTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 2352US2025046585A1Substrate processing system and transfer methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 2450US2025232965A1Substrate processing systemTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 2549US12080572B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Sep 3, 2024·0 cites·12 claims
- 2649US2022243336A1Storage container and processing systemTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 2749US2022148857A1Detection device, processing system, and transfer methodTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 2848US12285786B2Substrate processing apparatus, purge gas control method, and vacuum transfer chamber cleaning methodTOKYO ELECTRON LTD·Filed 2021·Granted Apr 29, 2025·0 cites·20 claims
- 2947US11791180B2Substrate transfer system and load lock moduleTOKYO ELECTRON LTD·Filed 2021·Granted Oct 17, 2023·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →