Inventor · disambiguated record
Masato Koakutsu
Also filed as: KOAKUTSU MASATO
9 granted patents·3 pending applications·298 citations·filing 2012–2021
83Inventor score
Top patents by PatentIndex Score
12 records- 0196US9748104B2Method of depositing filmTOKYO ELECTRON LTD·Filed 2014·Granted Aug 29, 2017·280 cites·16 claims
- 0289US9136133B2Method of depositing filmTOKYO ELECTRON LTD·Filed 2014·Granted Sep 15, 2015·12 cites·14 claims
- 0373US8987147B2Method of depositing a film using a turntable apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Mar 24, 2015·3 cites·10 claims
- 0469US8992079B2Temperature measurement apparatus, method of estimating temperature profile, recording medium and heat treatment apparatusMOROI MASAYUKI·Filed 2012·Granted Mar 31, 2015·3 cites·10 claims
- 0559US2021180182A1Method of cleaning exhaust pipeTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0651US10975466B2Method of cleaning exhaust pipeTOKYO ELECTRON LTD·Filed 2018·Granted Apr 13, 2021·0 cites·4 claims
- 0746US8921237B2Method of depositing a filmTOKYO ELECTRON LTD·Filed 2013·Granted Dec 30, 2014·0 cites·9 claims
- 0842US11702739B2Film deposition method and film deposition apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Jul 18, 2023·0 cites·12 claims
- 0942US2014209028A1Film deposition apparatusTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 1040US2013164936A1Film deposition methodTOKYO ELECTRON LTD·Filed 2012·Application pending·0 cites
- 1139US11075076B2Method for manufacturing a semiconductor device and film deposition apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jul 27, 2021·0 cites·2 claims
- 1239US10961623B2Film forming methodTOKYO ELECTRON LTD·Filed 2018·Granted Mar 30, 2021·0 cites·18 claims
Join the waitlist — get patent alerts
Get an alert when Masato Koakutsu files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →