Inventor · disambiguated record
Masaya Komatsu
Also filed as: KOMATSU MASAYA
6 granted patents·182 citations·filing 1994–2020
82Inventor score
Technology areasG03F
Top patents by PatentIndex Score
6 records- 0195US5739898AExposure method and apparatusNIKON CORP·Filed 1994·Granted Apr 14, 1998·150 cites·30 claims
- 0259US5682226APhotomask, an exposure method and a projection exposure apparatusNIKON CORP·Filed 1996·Granted Oct 28, 1997·18 cites·6 claims
- 0357US11662666B2Sub-field control of a lithographic process and associated apparatusASML NETHERLANDS BV·Filed 2020·Granted May 30, 2023·0 cites·20 claims
- 0448US6610460B2Exposure methodNIKON CORP·Filed 2002·Granted Aug 26, 2003·2 cites·15 claims
- 0544US5592259APhotomask, an exposure method and a projection exposure apparatusNIKON CORP·Filed 1995·Granted Jan 7, 1997·9 cites·22 claims
- 0630US5508132APhoto maskNIKON CORP·Filed 1994·Granted Apr 16, 1996·3 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →