Inventor · disambiguated record
Masahiko Kowaka
Also filed as: KOWAKA MASAHIKO
16 granted patents·2 pending applications·1,561 citations·filing 1987–2007
96Inventor score
Files withKOMATSU MFG CO LTD13APPLIED MATERIALS INC3APPLIED KOMATSU TECHNOLOGY INC1KOMATSU SHISAKUSHO KK1
Top patents by PatentIndex Score
18 records- 0197US5716133AShielded heat sensor for measuring temperatureAPPLIED KOMATSU TECHNOLOGY INC·Filed 1995·Granted Feb 10, 1998·524 cites·20 claims
- 0297US5142543AMethod and system for controlling narrow-band oscillation excimer laserKOMATSU MFG CO LTD·Filed 1989·Granted Aug 25, 1992·130 cites·17 claims
- 0396US5450436ALaser gas replenishing apparatus and method in excimer laser systemKOMATSU MFG CO LTD·Filed 1993·Granted Sep 12, 1995·123 cites·31 claims
- 0496US4975919ALaser wavelength control apparatusKOMATSU MFG CO LTD·Filed 1988·Granted Dec 4, 1990·90 cites·17 claims
- 0595US5404366ANarrow band excimer laser and wavelength detecting apparatusKOMATSU MFG CO LTD·Filed 1994·Granted Apr 4, 1995·94 cites·19 claims
- 0695US5081635AApparatus for controlling output from an excimer laser deviceKOMATSU MFG CO LTD·Filed 1988·Granted Jan 14, 1992·82 cites·33 claims
- 0792US5373515ALaser wavelength controlling apparatusKOMATSU MFG CO LTD·Filed 1991·Granted Dec 13, 1994·114 cites·8 claims
- 0892US4856018ALight source for reduced projectionKOMATSU MFG CO LTD·Filed 1987·Granted Aug 8, 1989·68 cites·4 claims
- 0991US4829536AMulti-mode narrow-band oscillation excimer laserKOMATSU MFG CO LTD·Filed 1987·Granted May 9, 1989·83 cites·2 claims
- 1086US5596596ANarrow band excimer laserKOMATSU MFG CO LTD·Filed 1995·Granted Jan 21, 1997·71 cites·7 claims
- 1186US4926428AMethod and apparatus for sensing the wavelength of a laser beamKOMATSU MFG CO LTD·Filed 1987·Granted May 15, 1990·55 cites·11 claims
- 1283US5802094ANarrow band excimer laserKOMATSU MFG CO LTD·Filed 1996·Granted Sep 1, 1998·61 cites·7 claims
- 1371US6510888B1Substrate support and method of fabricating the sameAPPLIED MATERIALS INC·Filed 2001·Granted Jan 28, 2003·13 cites·20 claims
- 1465US5198872AApparatus for detecting the wavelength of laser lightKOMATSU MFG CO LTD·Filed 1990·Granted Mar 30, 1993·29 cites·12 claims
- 1562US5218421AWavelength detecting apparatusKOMATSU MFG CO LTD·Filed 1991·Granted Jun 8, 1993·24 cites·23 claims
- 1653US2007256637A1Methods and apparatus for using a reinforced diffuser in substrate processingAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 1739US2003079853A1Substrate support and method of fabricating the sameAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
- 1823USRE38372ENarrow band excimer laser and wavelength detecting apparatusKOMATSU SHISAKUSHO KK·Filed 1997·Granted Dec 30, 2003·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →