Inventor · disambiguated record
Martin E. Lee
Also filed as: LEE MARTIN · LEE MARTIN E · LEE MARTIN EDWARD
43 granted patents·9 pending applications·4,787 citations·filing 1982–2012
99Inventor score
Top patents by PatentIndex Score
52 records- 0199US6683433B2Exposure apparatus and method utilizing isolated reaction frameNIKON CORP·Filed 2001·Granted Jan 27, 2004·133 cites·33 claims
- 0299US5874820AWindow frame-guided stage mechanismNIKON CORP·Filed 1995·Granted Feb 23, 1999·760 cites·15 claims
- 0399US5528118AGuideless stage with isolated reaction stageNIKON PRECISION INC·Filed 1994·Granted Jun 18, 1996·788 cites·14 claims
- 0498US6841965B2Guideless stage with isolated reaction stageNIKON CORP·Filed 2001·Granted Jan 11, 2005·129 cites·106 claims
- 0598US6747732B1Method of making exposure apparatus with dynamically isolated reaction frameNIKON CORP·Filed 2003·Granted Jun 8, 2004·109 cites·27 claims
- 0698US6316901B2Exposure apparatus and method utilizing isolated reaction frameNIKON CORP·Filed 2001·Granted Nov 13, 2001·101 cites·21 claims
- 0797US6246202B1Method of making exposure apparatus with dynamically isolated reaction frameNIKON CORP·Filed 1998·Granted Jun 12, 2001·112 cites·69 claims
- 0897US6188195B1Exposure method, and method of making exposure apparatus having dynamically isolated support structureNIKON CORP·Filed 1999·Granted Feb 13, 2001·133 cites·52 claims
- 0997US6175404B1Exposure apparatus having dynamically isolated reaction frameNIKON CORP·Filed 1999·Granted Jan 16, 2001·134 cites·27 claims
- 1097US6150787AExposure apparatus having dynamically isolated reaction frameNIKON CORP·Filed 1999·Granted Nov 21, 2000·106 cites·22 claims
- 1197US6087797AExposure method, and method of making exposure apparatus having dynamically isolated reaction frameNIKON CORP·Filed 1999·Granted Jul 11, 2000·108 cites·72 claims
- 1297US6020710AExposure method, and method of making exposure apparatus having dynamically isolated reaction frameNIKON CORP·Filed 1999·Granted Feb 1, 2000·141 cites·59 claims
- 1397US5744924AGuideless stage with isolated reaction frameNIKON CORP·Filed 1996·Granted Apr 28, 1998·188 cites·15 claims
- 1496US6151105AExposure apparatus having dynamically isolated support structureNIKON CORP·Filed 1999·Granted Nov 21, 2000·99 cites·21 claims
- 1596US6049186AMethod for making and operating an exposure apparatus having a reaction frameNIKON CORP·Filed 1998·Granted Apr 11, 2000·134 cites·65 claims
- 1696US5982128ALithography apparatus with movable stage and mechanical isolation of stage driveNIKON CORP·Filed 1998·Granted Nov 9, 1999·144 cites·84 claims
- 1796US5942871ADouble flexure support for stage drive coilNIKON CORP·Filed 1996·Granted Aug 24, 1999·140 cites·9 claims
- 1895US7365513B1Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning deviceNIKON CORP·Filed 1999·Granted Apr 29, 2008·117 cites·8 claims
- 1995US6927840B2Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning deviceNIKON CORP·Filed 2004·Granted Aug 9, 2005·92 cites·14 claims
- 2095US6281654B1Method for making apparatus with dynamic support structure isolation and exposure methodNIKON CORP·Filed 1999·Granted Aug 28, 2001·128 cites·148 claims
- 2195US6271640B1Exposure apparatus having reaction frameNIKON CORP·Filed 1999·Granted Aug 7, 2001·120 cites·36 claims
- 2294US6989647B1Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning deviceNIKON CORP·Filed 1999·Granted Jan 24, 2006·138 cites·6 claims
- 2394US6355994B1Precision stageMULTIBEAM SYSTEMS INC·Filed 2000·Granted Mar 12, 2002·81 cites·37 claims
- 2494US6008500AExposure apparatus having dynamically isolated reaction frameNIKON CORP·Filed 1999·Granted Dec 28, 1999·115 cites·31 claims
- 2594US4444492AApparatus for projecting a series of images onto dies of a semiconductor waferGEN SIGNAL CORP·Filed 1982·Granted Apr 24, 1984·84 cites·15 claims
- 2693US8767172B2Projection optical device and exposure apparatusEBIHARA AKIMITSU·Filed 2010·Granted Jul 1, 2014·8 cites·39 claims
- 2792USD692886SFolio keyboard for tablet computerBATES MATHEW·Filed 2012·Granted Nov 5, 2013·65 cites·1 claims
- 2891US5552888AApparatus for measuring position of an X-Y stageNIKON PRECISION INC·Filed 1994·Granted Sep 3, 1996·66 cites·29 claims
- 2991US4425037AApparatus for projecting a series of images onto dies of a semiconductor waferGEN SIGNAL CORP·Filed 1982·Granted Jan 10, 1984·71 cites·15 claims
- 3089US6590639B1Active vibration isolation system having pressure controlNIKON CORP·Filed 2000·Granted Jul 8, 2003·35 cites·29 claims
- 3185US6872958B2Platform positioning systemMULTIBEAM SYSTEMS INC·Filed 2002·Granted Mar 29, 2005·31 cites·23 claims
- 3277US6888620B2System and method for holding a device with minimal deformationNIKON CORP·Filed 2001·Granted May 3, 2005·14 cites·144 claims
- 3376US6471435B1Flexural jointMULTIBEAM SYSTEMS INC·Filed 2000·Granted Oct 29, 2002·19 cites·4 claims
- 3473US5838450ADirect reticle to wafer alignment using fluorescence for integrated circuit lithographyNIKON PRECISION INC·Filed 1995·Granted Nov 17, 1998·34 cites·30 claims
- 3572US6302585B1Two Axis stage with arcuate surface bearingsNIKON CORP·Filed 2000·Granted Oct 16, 2001·12 cites·14 claims
- 3671US6323494B1Vertical direction force transducerNIKON CORP·Filed 1999·Granted Nov 27, 2001·21 cites·18 claims
- 3768US6646719B2Support assembly for an exposure apparatusNIKON CORP·Filed 2001·Granted Nov 11, 2003·9 cites·75 claims
- 3865US7333179B2Moving mechanism with high bandwidth response and low force transmissibilityNIKON CORP·Filed 2004·Granted Feb 19, 2008·7 cites·43 claims
- 3965US6130490AX-Y stage with movable magnet plateNIKON CORP·Filed 1999·Granted Oct 10, 2000·31 cites·15 claims
- 4061US6882126B2Holder mover for a stage assemblyNIKON CORP·Filed 2001·Granted Apr 19, 2005·6 cites·114 claims
- 4160US7061577B2Image adjustor including damping assemblyNIKON CORP·Filed 2002·Granted Jun 13, 2006·6 cites·139 claims
- 4256US5708505ALaser interferometer having a sheath for the laser beamNIKON CORP·Filed 1996·Granted Jan 13, 1998·17 cites·36 claims
- 4354US2008180053A1Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning deviceNIKON CORP·Filed 2008·Application pending·0 cites
- 4449US2008068568A1Projection Optical Device And Exposure ApparatusNIKON CORP·Filed 2005·Application pending·0 cites
- 4543US2007236854A1Anti-Gravity Device for Supporting Weight and Reducing TransmissibilityLEE MARTIN E·Filed 2006·Application pending·0 cites
- 4640US2007030462A1Low spring constant, pneumatic suspension with vacuum chamber, air bearing, active force compensation, and sectioned vacuum chambersNIKON CORP·Filed 2005·Application pending·0 cites
- 4739US2005286050A1Real-time through lens image measurement system and methodNIKON CORP·Filed 2004·Application pending·0 cites
- 4838US2003080631A1Sheet coils and linear motors comprising same, and stage units and microlithography apparatus comprising said linear motorsNIKON CORP·Filed 2001·Application pending·0 cites
- 4936US2002109823A1Wafer stage assemblyNIKON CORP·Filed 2001·Application pending·0 cites
- 5035US2002137358A1Multiple point support assembly for a stageFiled 2001·Application pending·0 cites
Showing the top 50 of 52 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →