Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device

Abstract

A positioning device includes an object table, a sub-system for processing an object to be placed on the object table, a drive unit for displacing the object table relative to the sub-system, and a measuring system for measuring a position of the object table relative to the sub-system. The drive unit includes a stationary part which is fastened to a first frame of the positioning device, while the measuring system includes a stationary part and a movable part which is fastened to the object table for cooperation with the stationary part of the measuring system. The stationary part of the measuring system is fastened to a second frame of the positioning device which is dynamically isolated from the first frame.

1 . A positioning device comprising an object table, a sub-system for processing an object to be placed on the object table, a drive unit for displacing the object table relative to the sub-system, and a measuring system for measuring a position of the object table relative to the sub-system, the drive unit comprising a stationary part which is fastened to a first frame of the positioning device, while the measuring system comprises a stationary part and a movable part which is fastened to the object table for cooperation with the stationary part of the measuring system, characterized in that the stationary part of the measuring system is fastened to a second frame of the positioning device which is dynamically isolated from the first frame.