Inventor · disambiguated record
Marco Le Kluse
Also filed as: LE KLUSE MARCO
6 granted patents·68 citations·filing 2003–2011
83Inventor score
Top patents by PatentIndex Score
6 records- 0191US7187433B2Electrostatic clamp assembly for a lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Mar 6, 2007·18 cites·19 claims
- 0287US8476167B2Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatusVAN MIERLO HUBERT ADRIAAN·Filed 2011·Granted Jul 2, 2013·14 cites·13 claims
- 0377US6897945B1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted May 24, 2005·19 cites·14 claims
- 0468US7041989B1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 9, 2006·9 cites·20 claims
- 0560US7245357B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jul 17, 2007·8 cites·20 claims
- 0651US7528935B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2005·Granted May 5, 2009·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →