Inventor · disambiguated record

Mayasari Lim

Also filed as: LIM MAYASARI

2 granted patents·197 citations·filing 2003–2004

70Inventor score

Technology areasC23C H10P

Files withNOVELLUS SYSTEMS INC2

Top patents by PatentIndex Score

2 records

0194US7078312B1Method for controlling etch process repeatabilityNOVELLUS SYSTEMS INC·Filed 2003·Granted Jul 18, 2006·163 cites·22 claims
0287US7217658B1Process modulation to prevent structure erosion during gap fillNOVELLUS SYSTEMS INC·Filed 2004·Granted May 15, 2007·34 cites·41 claims

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