Inventor · disambiguated record
Marie Lowe
Also filed as: LOWE MARIE
1 granted patent·4 pending applications·12 citations·filing 2004–2006
34Inventor score
Top patents by PatentIndex Score
5 records- 0179US7291565B2Method and system for treating a substrate with a high pressure fluid using fluorosilicic acidTOKYO ELECTRON LTD·Filed 2005·Granted Nov 6, 2007·12 cites·6 claims
- 0237US2006102590A1Method for treating a substrate with a high pressure fluid using a preoxide-based process chemistryTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 0334US2006102591A1Method and system for treating a substrate using a supercritical fluidTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 0432US2006186088A1Etching and cleaning BPSG material using supercritical processingJACOBSON GUNILLA·Filed 2005·Application pending·0 cites
- 0528US2006255315A1Selective removal chemistries for semiconductor applications, methods of production and uses thereofYELLOWAGA DEBORAH L·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →