Inventor · disambiguated record
Masatsugu Makabe
Also filed as: MAKABE MASATSUGU
2 granted patents·1 pending application·10 citations·filing 2012–2021
48Inventor score
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0184US8896210B2Plasma processing apparatus and methodTOKYO ELECTRON LTD·Filed 2012·Granted Nov 25, 2014·10 cites·21 claims
- 0242US11810792B2Etching method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Nov 7, 2023·0 cites·15 claims
- 0335US2020243355A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →