Inventor · disambiguated record

Mary Anne Manumpil

Also filed as: MANUMPIL MARY ANNE

5 granted patents·2 pending applications·39 citations·filing 2020–2025

77Inventor score

Technology areasH10P

Files withLAM RES CORP7

Top patents by PatentIndex Score

7 records

0195US11988965B2Underlayer for photoresist adhesion and dose reductionLAM RES CORP·Filed 2021·Granted May 21, 2024·13 cites·42 claims
0295US11314168B2Underlayer for photoresist adhesion and dose reductionLAM RES CORP·Filed 2021·Granted Apr 26, 2022·24 cites·79 claims
0394US12474638B2Underlayer for photoresist adhesion and dose reductionLAM RES CORP·Filed 2024·Granted Nov 18, 2025·2 cites·63 claims
0484US2025328076A1Underlayer for photoresist adhesion and dose reductionLAM RES CORP·Filed 2025·Application pending·0 cites
0574US2024395542A1High etch selectivity, low stress ashable carbon hard maskLAM RES CORP·Filed 2024·Application pending·0 cites
0663US12062537B2High etch selectivity, low stress ashable carbon hard maskLAM RES CORP·Filed 2020·Granted Aug 13, 2024·0 cites·34 claims
0745US12435412B2High density, modulus, and hardness amorphous carbon films at low pressureLAM RES CORP·Filed 2020·Granted Oct 7, 2025·0 cites·27 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →