Inventor · disambiguated record
Martin J. Mcgrath
Also filed as: MCGRATH MARTIN J
4 granted patents·286 citations·filing 1994–1996
81Inventor score
Top patents by PatentIndex Score
4 records- 0187US5483138ASystem and method for automated positioning of a substrate in a processing chamberAPPLIED MATERIALS INC·Filed 1994·Granted Jan 9, 1996·211 cites·18 claims
- 0268US5975736AScrubber control systemONTRAK SYSTEMS INC·Filed 1996·Granted Nov 2, 1999·37 cites·19 claims
- 0352US5606251AMethod and apparatus for detecting a substrate in a substrate processing systemONTRAK SYSTEMS INC·Filed 1994·Granted Feb 25, 1997·24 cites·14 claims
- 0452US5548505AScrubber control systemONTRAK SYSTEMS INC·Filed 1994·Granted Aug 20, 1996·14 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →