Inventor · disambiguated record
Mariya Vyacheslavivna Medvedyeva
Also filed as: MEDVEDYEVA MARIYA VYACHESLAVIVNA
6 granted patents·12 citations·filing 2018–2020
72Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV6
Top patents by PatentIndex Score
6 records- 0196US10488768B2Beat patterns for alignment on small metrology targetsASML NETHERLANDS BV·Filed 2018·Granted Nov 26, 2019·10 cites·20 claims
- 0275US11531274B2Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targetsASML NETHERLANDS BV·Filed 2020·Granted Dec 20, 2022·1 cites·14 claims
- 0367US11506566B2Method of processing data, method of obtaining calibration dataASML NETHERLANDS BV·Filed 2018·Granted Nov 22, 2022·1 cites·20 claims
- 0451US10571363B2Method of determining an optimal focus height for a metrology apparatusASML NETHERLANDS BV·Filed 2019·Granted Feb 25, 2020·0 cites·20 claims
- 0546US10585354B2Method of optimizing a metrology processASML NETHERLANDS BV·Filed 2019·Granted Mar 10, 2020·0 cites·20 claims
- 0644US10585048B2Method of determining a value of a parameter of interest of a target formed by a patterning processASML NETHERLANDS BV·Filed 2019·Granted Mar 10, 2020·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →