Inventor · disambiguated record

Marco G. H. Meijerink

Also filed as: MEIJERINK MARCO G H

1 granted patent·3 citations·filing 2007–2007

20Inventor score

Technology areasG03F

Files withZEISS CARL SMT GMBH1

Top patents by PatentIndex Score

1 record

0165US7959310B2Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical elementZEISS CARL SMT GMBH·Filed 2007·Granted Jun 14, 2011·3 cites·28 claims

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