Inventor · disambiguated record
Massimiliano Merli
Also filed as: MERLI MASSIMILIANO
24 granted patents·3 pending applications·16 citations·filing 2016–2025
91Inventor score
Top patents by PatentIndex Score
27 records- 0196US11327295B2Resonant MEMS device having a tiltable, piezoelectrically controlled structure, in particular a micromirrorST MICROELECTRONICS SRL·Filed 2020·Granted May 10, 2022·4 cites·23 claims
- 0292US11933966B2Resonant MEMS device having a tiltable, piezoelectrically controlled micromirrorST MICROELECTRONICS SRL·Filed 2022·Granted Mar 19, 2024·2 cites·18 claims
- 0391US11520138B2Biaxial resonant microelectromechanical mirror structure with piezoelectric actuation having improved characteristicsST MICROELECTRONICS SRL·Filed 2020·Granted Dec 6, 2022·3 cites·19 claims
- 0482US11656539B2Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristicsST MICROELECTRONICS SRL·Filed 2019·Granted May 23, 2023·2 cites·21 claims
- 0577US11086122B2Microelectromechanical device having a structure tiltable through an actuation of the piezoelectric typeST MICROELECTRONICS SRL·Filed 2018·Granted Aug 10, 2021·2 cites·21 claims
- 0674US10365475B2Oscillating structure with piezoelectric actuation, system and manufacturing methodST MICROELECTRONICS SRL·Filed 2017·Granted Jul 30, 2019·2 cites·24 claims
- 0773US11953813B2Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristicsST MICROELECTRONICS SRL·Filed 2023·Granted Apr 9, 2024·0 cites·21 claims
- 0872US12043540B2Micro-electro-mechanical device with a shock-protected tiltable structureST MICROELECTRONICS SRL·Filed 2023·Granted Jul 23, 2024·0 cites·21 claims
- 0971US11933968B2Biaxial resonant microelectromechanical mirror structure with piezoelectric actuation having improved characteristicsST MICROELECTRONICS SRL·Filed 2022·Granted Mar 19, 2024·0 cites·20 claims
- 1068US10175474B2Micromechanical device having a structure tiltable by a quasi-static piezoelectric actuationST MICROELECTRONICS SRL·Filed 2016·Granted Jan 8, 2019·1 cites·19 claims
- 1162US12292567B2Microelectromechanical mirror device with compensation of planarity errorsST MICROELECTRONICS SRL·Filed 2021·Granted May 6, 2025·0 cites·38 claims
- 1259US12493180B2Microelectromechanical mirror device with piezoelectric actuation having improved stress resistanceST MICROELECTRONICS SRL·Filed 2023·Granted Dec 9, 2025·0 cites·20 claims
- 1359US2025388455A1Mems device having a tiltable structure and quasi-static piezoelectric actuation, in particular micromirror, with improved efficiencyST MICROELECTRONICS INT NV·Filed 2025·Application pending·0 cites
- 1458US12270990B2Microelectromechanical mirror device with piezoelectric actuation and improved opening angleST MICROELECTRONICS SRL·Filed 2022·Granted Apr 8, 2025·0 cites·21 claims
- 1557US12117608B2MEMS micromirror device enveloped in a package having a transparent surface and having a tiltable platformST MICROELECTRONICS SRL·Filed 2021·Granted Oct 15, 2024·0 cites·5 claims
- 1657US11448871B2Micromechanical device having a structure tiltable by a quasi-static piezoelectric actuation and having stiffening elementsST MICROELECTRONICS SRL·Filed 2019·Granted Sep 20, 2022·0 cites·27 claims
- 1757US2024425359A1Mems device having an improved stress distribution and manufacturing process thereofST MICROELECTRONICS SRL·Filed 2024·Application pending·0 cites
- 1855US12510749B2Biaxial microelectromechanical mirror device with piezoelectric actuationST MICROELECTRONICS SRL·Filed 2023·Granted Dec 30, 2025·0 cites·20 claims
- 1955US12242051B2Microelectromechanical mirror device with piezoelectric actuation and piezoresistive sensing having self-calibration propertiesST MICROELECTRONICS SRL·Filed 2022·Granted Mar 4, 2025·0 cites·20 claims
- 2054US11673799B2Method of processing a wafer for manufacturing an oscillating structure such as a micro-mirrorST MICROELECTRONICS SRL·Filed 2021·Granted Jun 13, 2023·0 cites·25 claims
- 2153US12222492B2Microelectromechanical device having a structure tiltable by piezoelectric actuation about two rotation axesST MICROELECTRONICS SRL·Filed 2021·Granted Feb 11, 2025·0 cites·20 claims
- 2253US11655140B2Micro-electro-mechanical device with a shock-protected tiltable structureST MICROELECTRONICS SRL·Filed 2020·Granted May 23, 2023·0 cites·24 claims
- 2352US12084341B2MEMS device having an improved stress distribution and manufacturing process thereofST MICROELECTRONICS SRL·Filed 2021·Granted Sep 10, 2024·0 cites·12 claims
- 2450US11353694B2Microelectromechanical mirror device with piezoelectric actuation, having an improved structureST MICROELECTRONICS SRL·Filed 2020·Granted Jun 7, 2022·0 cites·21 claims
- 2550US2022350134A1Process for manufacturing a microelectromechanical mirror device and microelectromechanical mirror deviceST MICROELECTRONICS SRL·Filed 2022·Application pending·0 cites
- 2647US12117605B2Angular piezoelectric actuator for a MEMS shutter and manufacturing method thereofST MICROELECTRONICS SRL·Filed 2021·Granted Oct 15, 2024·0 cites·27 claims
- 2745US10048491B2MEMS device oscillating about two axes and having a position detecting system, in particular of a piezoresistive typeST MICROELECTRONICS SRL·Filed 2016·Granted Aug 14, 2018·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →