Inventor · disambiguated record
Matsutaro Miyamoto
Also filed as: MIYAMOTO MATSUTARO
43 granted patents·9 pending applications·368 citations·filing 1996–2024
98Inventor score
Top patents by PatentIndex Score
52 records- 0192US6514348B2Substrate processing apparatusEBARA CORP·Filed 2001·Granted Feb 4, 2003·49 cites·8 claims
- 0291USD802723SSealing ringEBARA CORP·Filed 2016·Granted Nov 14, 2017·34 cites·1 claims
- 0390US11697886B2Substrate holderEBARA CORP·Filed 2020·Granted Jul 11, 2023·1 cites·20 claims
- 0486US10577713B2Substrate holder, plating apparatus, and method for manufacturing substrate holderEBARA CORP·Filed 2017·Granted Mar 3, 2020·4 cites·14 claims
- 0584US6793466B2Vacuum pumpEBARA CORP·Filed 2001·Granted Sep 21, 2004·43 cites·12 claims
- 0683US8067732B2Electron beam apparatusNAKASUJI MAMORU·Filed 2006·Granted Nov 29, 2011·8 cites·4 claims
- 0781US5679992ABearing unitEBARA CORP·Filed 1996·Granted Oct 21, 1997·38 cites·10 claims
- 0877US10738390B2Substrate holder and plating apparatus using the sameEBARA CORP·Filed 2017·Granted Aug 11, 2020·2 cites·25 claims
- 0976US2025205851A1Semiconductor processing device and polishing deviceEBARA CORP·Filed 2024·Application pending·0 cites
- 1075US12288707B2Substrate holderEBARA CORP·Filed 2023·Granted Apr 29, 2025·0 cites·7 claims
- 1175US2025073851A1Free joint structure, push-pull device, and substrate processing moduleEBARA CORP·Filed 2024·Application pending·0 cites
- 1275US2025128380A1Polishing apparatusEBARA CORP·Filed 2024·Application pending·0 cites
- 1373US9508526B2Top opening-closing mechanism and inspection apparatusEBARA CORP·Filed 2014·Granted Nov 29, 2016·2 cites·6 claims
- 1473US6617722B2Magnetic levitation rotating machineEBARA CORP·Filed 2001·Granted Sep 9, 2003·13 cites·9 claims
- 1573US6589009B1Turbo-molecular pumpEBARA CORP·Filed 2000·Granted Jul 8, 2003·20 cites·4 claims
- 1670US6926493B1Turbo-molecular pumpEBARA CORP·Filed 1999·Granted Aug 9, 2005·33 cites·61 claims
- 1770US2024139909A1Substrate processing apparatusEBARA CORP·Filed 2023·Application pending·0 cites
- 1869US11718925B2Holder for holding substrate and system for platingEBARA CORP·Filed 2022·Granted Aug 8, 2023·0 cites·5 claims
- 1969US10793967B2Substrate holder and plating apparatus using the sameEBARA CORP·Filed 2017·Granted Oct 6, 2020·1 cites·16 claims
- 2069US9970459B2Vacuum pump connecting apparatus and method for installing vacuum pump connecting apparatusEBARA CORP·Filed 2014·Granted May 15, 2018·2 cites·15 claims
- 2167USD825629SElectrical contactEBARA CORP·Filed 2015·Granted Aug 14, 2018·11 cites·1 claims
- 2264US11668018B2Contact structure, substrate holder, apparatus for plating, and method of feeding electric power to substrateEBARA CORP·Filed 2021·Granted Jun 6, 2023·0 cites·21 claims
- 2363USD797674SElectrical contactEBARA CORP·Filed 2015·Granted Sep 19, 2017·8 cites·1 claims
- 2462US11299817B2Holder for holding substrate and system for platingEBARA CORP·Filed 2018·Granted Apr 12, 2022·0 cites·15 claims
- 2561US11542625B2Substrate holderEBARA CORP·Filed 2020·Granted Jan 3, 2023·0 cites·18 claims
- 2661USD948438SElectrical contactEBARA CORP·Filed 2019·Granted Apr 12, 2022·6 cites·1 claims
- 2757US11676837B2Substrate holderEBARA CORP·Filed 2019·Granted Jun 13, 2023·0 cites·11 claims
- 2857USD776621SElectrical contactEBARA CORP·Filed 2015·Granted Jan 17, 2017·7 cites·1 claims
- 2957USD771571SElectrical contactEBARA CORP·Filed 2015·Granted Nov 15, 2016·7 cites·1 claims
- 3053US11236435B2Method for holding substrate on substrate holderEBARA CORP·Filed 2019·Granted Feb 1, 2022·0 cites·4 claims
- 3152US11248308B2Substrate holder and plating apparatus with substrate holderEBARA CORP·Filed 2020·Granted Feb 15, 2022·0 cites·14 claims
- 3252USD847762SElectrical contactEBARA CORP·Filed 2018·Granted May 7, 2019·3 cites·1 claims
- 3352US7645126B2Vacuum pump and semiconductor manufacturing apparatusEBARA CORP·Filed 2004·Granted Jan 12, 2010·5 cites·9 claims
- 3452US6332752B2Turbo-molecular pumpEBARA CORP·Filed 1998·Granted Dec 25, 2001·15 cites·44 claims
- 3552US6220831B1Turbomolecular pumpEBARA CORP·Filed 1998·Granted Apr 24, 2001·18 cites·10 claims
- 3652US2023230863A1Substrate conveyance method, substrate processing device, and recording mediumEBARA CORP·Filed 2022·Application pending·0 cites
- 3750US9594014B2Installation structure of length meter for measuring a displacement of an object placed in vacuumEBARA CORP·Filed 2014·Granted Mar 14, 2017·0 cites·8 claims
- 3849US11214888B2Seal used for substrate holderEBARA CORP·Filed 2019·Granted Jan 4, 2022·0 cites·3 claims
- 3948US11232972B2Substrate holder, plating device, and plating method of substrateEBARA CORP·Filed 2019·Granted Jan 25, 2022·0 cites·15 claims
- 4048US2009108703A1Rotary apparatusEBARA CORP·Filed 2008·Application pending·0 cites
- 4146USD910579SElectrical contactEBARA CORP·Filed 2019·Granted Feb 16, 2021·2 cites·1 claims
- 4246US2014292111A1Stage device and electron beam application apparatusEBARA CORP·Filed 2014·Application pending·0 cites
- 4345US6953317B2Turbo-molecular pumpEBARA CORP·Filed 2001·Granted Oct 11, 2005·2 cites·30 claims
- 4444US11384447B2Substrate holder, plating apparatus, method for manufacturing substrate holder, and method for holding substrateEBARA CORP·Filed 2017·Granted Jul 12, 2022·0 cites·29 claims
- 4544US6398524B1Magnetic bearing control device and turbo-molecular pump deviceEBARA CORP·Filed 1998·Granted Jun 4, 2002·10 cites·8 claims
- 4644US6062810ATurbomolecular pumpEBARA CORP·Filed 1998·Granted May 16, 2000·12 cites·5 claims
- 4742USD835760SSealing ringEBARA CORP·Filed 2017·Granted Dec 11, 2018·2 cites·1 claims
- 4841US6217278B1Turbomolecular pumpEBARA CORP·Filed 1998·Granted Apr 17, 2001·10 cites·12 claims
- 4937US2003017047A1Turbo-molecular pumpEBARA CORP·Filed 2002·Application pending·0 cites
- 5036US2015275566A1Reflecting mirror posture adjustment structure, ceiling plate opening and closing mechanism, and inspection deviceEBARA CORP·Filed 2015·Application pending·0 cites
Showing the top 50 of 52 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →