Inventor · disambiguated record
Matthew Mudrow
Also filed as: MUDROW MATTHEW · MUDROW MATTHEW SCOTT
7 granted patents·2 pending applications·29 citations·filing 2016–2024
79Inventor score
Files withLAM RES CORP9
Top patents by PatentIndex Score
9 records- 0195US11946142B2Spatially tunable deposition to compensate within wafer differential bowLAM RES CORP·Filed 2020·Granted Apr 2, 2024·4 cites·20 claims
- 0291US10147597B1Turbulent flow spiral multi-zone precursor vaporizerLAM RES CORP·Filed 2017·Granted Dec 4, 2018·18 cites·20 claims
- 0387US10354857B2High power low pressure UV bulb with plasma resistant coatingLAM RES CORP·Filed 2016·Granted Jul 16, 2019·6 cites·18 claims
- 0480US10161034B2Rapid chamber clean using concurrent in-situ and remote plasma sourcesLAM RES CORP·Filed 2017·Granted Dec 25, 2018·1 cites·19 claims
- 0573US12338531B2Spatially tunable deposition to compensate within wafer differential bowLAM RES CORP·Filed 2024·Granted Jun 24, 2025·0 cites·20 claims
- 0651US12410521B2Bidirectional indexing apparatusLAM RES CORP·Filed 2020·Granted Sep 9, 2025·0 cites·14 claims
- 0751US2022199379A1High temperature heating of a substrate in a processing chamberLAM RES CORP·Filed 2020·Application pending·0 cites
- 0844US2022136107A1Showerhead with configurable gas outletsLAM RES CORP·Filed 2020·Application pending·0 cites
- 0941US12215804B2Cooling of air actuated valve using actuating airLAM RES CORP·Filed 2020·Granted Feb 4, 2025·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →