Inventor · disambiguated record
Marcus Musselman
Also filed as: MUSSELMAN MARCUS
9 granted patents·22 citations·filing 2015–2021
83Inventor score
Files withLAM RES CORP9
Top patents by PatentIndex Score
9 records- 0196US10572697B2Method of etch model calibration using optical scatterometryLAM RES CORP·Filed 2018·Granted Feb 25, 2020·9 cites·34 claims
- 0290US10997345B2Method of etch model calibration using optical scatterometryLAM RES CORP·Filed 2020·Granted May 4, 2021·3 cites·34 claims
- 0385US10386821B2Systems and methods for calibrating scalar field contribution values for a limited number of sensors including a temperature value of an electrostatic chuck and estimating temperature distribution profiles based on calibrated valuesLAM RES CORP·Filed 2015·Granted Aug 20, 2019·3 cites·44 claims
- 0482US11704463B2Method of etch model calibration using optical scatterometryLAM RES CORP·Filed 2021·Granted Jul 18, 2023·1 cites·24 claims
- 0582US11011353B2Systems and methods for performing edge ring characterizationLAM RES CORP·Filed 2017·Granted May 18, 2021·3 cites·18 claims
- 0677US11029668B2Systems and methods for calibrating scalar field contribution values for a limited number of sensors including a temperature value of an electrostatic chuck and estimating temperature distribution profiles based on calibrated valuesLAM RES CORP·Filed 2019·Granted Jun 8, 2021·1 cites·20 claims
- 0775US10312121B2Systems and methods for aligning measurement device in substrate processing systemsLAM RES CORP·Filed 2017·Granted Jun 4, 2019·2 cites·14 claims
- 0842US11056405B2Methods and systems for controlling wafer fabrication processLAM RES CORP·Filed 2018·Granted Jul 6, 2021·0 cites·16 claims
- 0933US10763142B2System and method for determining field non-uniformities of a wafer processing chamber using a wafer processing parameterLAM RES CORP·Filed 2015·Granted Sep 1, 2020·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →