Inventor · disambiguated record
Manabu Nakagawasai
Also filed as: NAKAGAWASAI MANABU
11 granted patents·2 pending applications·4 citations·filing 2017–2021
79Inventor score
Top patents by PatentIndex Score
13 records- 0194US11532784B2Substrate processing apparatus and methodTOKYO ELECTRON LTD·Filed 2021·Granted Dec 20, 2022·3 cites·18 claims
- 0270US11417504B2Stage device and processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Aug 16, 2022·1 cites·19 claims
- 0360US11608555B2Sputtering apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Mar 21, 2023·0 cites·13 claims
- 0457US11867458B2Temperature sensor, temperature measuring device, and temperature measuring methodTOKYO ELECTRON LTD·Filed 2021·Granted Jan 9, 2024·0 cites·20 claims
- 0555US12362155B2Substrate processing apparatus, temperature control method of substrate processing apparatus, and program of control device for controlling substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Jul 15, 2025·0 cites·7 claims
- 0655US12167542B2Method for manufacturing substrate with sensorTOKYO ELECTRON LTD·Filed 2021·Granted Dec 10, 2024·0 cites·9 claims
- 0752US11605547B2Temperature measuring mechanism, temperature measuring method, and stage deviceTOKYO ELECTRON LTD·Filed 2020·Granted Mar 14, 2023·0 cites·20 claims
- 0851US12211706B2Substrate processing device and method of manufacturing substrate processing deviceTOKYO ELECTRON LTD·Filed 2021·Granted Jan 28, 2025·0 cites·18 claims
- 0948US2019099776A1Compressible media applicator, application system and methods for sameHACKENBERG KEN P·Filed 2017·Application pending·0 cites
- 1046US11293092B2Stage device and processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Apr 5, 2022·0 cites·19 claims
- 1144US12392026B2Method and device for substrate processingTOKYO ELECTRON LTD·Filed 2020·Granted Aug 19, 2025·0 cites·20 claims
- 1242US10847399B2Movable structure and film forming apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Nov 24, 2020·0 cites·10 claims
- 1340US2020381272A1Placing table structure and treatment deviceTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →