Inventor · disambiguated record

Mayuko Nakamura

Also filed as: NAKAMURA MAYUKO

3 granted patents·1 pending application·0 citations·filing 2019–2022

39Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD4

Top patents by PatentIndex Score

4 records

0155US12347676B2Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2022·Granted Jul 1, 2025·0 cites·15 claims
0253US12482695B2Substrate treatment method and substrate treatment deviceTOKYO ELECTRON LTD·Filed 2021·Granted Nov 25, 2025·0 cites·12 claims
0346US11915964B2Substrate processing apparatus and stageTOKYO ELECTRON LTD·Filed 2020·Granted Feb 27, 2024·0 cites·10 claims
0438US2022005690A1Method of forming silicon film on substrate having fine patternTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →