Inventor · disambiguated record
Maxim Aleksandrovich Nasalevich
Also filed as: NASALEVICH MAXIM ALEKSANDROVICH
21 granted patents·2 pending applications·27 citations·filing 2016–2024
92Inventor score
Files withASML NETHERLANDS BV23
Top patents by PatentIndex Score
23 records- 0196US10983431B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2019·Granted Apr 20, 2021·5 cites·20 claims
- 0293US11971654B2Metal-silicide-nitridation for stress reductionASML NETHERLANDS BV·Filed 2023·Granted Apr 30, 2024·1 cites·20 claims
- 0393US10466585B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2016·Granted Nov 5, 2019·4 cites·20 claims
- 0492US11287737B2Metal-silicide-nitridation for stress reductionASML NETHERLANDS BV·Filed 2018·Granted Mar 29, 2022·5 cites·20 claims
- 0590US11686997B2Metal-silicide-nitridation for stress reductionASML NETHERLANDS BV·Filed 2022·Granted Jun 27, 2023·1 cites·20 claims
- 0689US11467486B2Graphene pellicle lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Oct 11, 2022·4 cites·21 claims
- 0788US10908496B2Membrane for EUV lithographyASML NETHERLANDS BV·Filed 2017·Granted Feb 2, 2021·3 cites·20 claims
- 0882US12117726B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2023·Granted Oct 15, 2024·0 cites·20 claims
- 0981US2024302734A1Metal-silicide-nitridation for stress reductionASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 1080US12066758B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2022·Granted Aug 20, 2024·0 cites·20 claims
- 1179US11231646B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2018·Granted Jan 25, 2022·1 cites·20 claims
- 1278US12474629B2Membrane for EUV lithographyASML NETHERLANDS BV·Filed 2023·Granted Nov 18, 2025·0 cites·20 claims
- 1376US11947256B2Simultaneous double-side coating of multilayer graphene pellicle by local thermal processingASML NETHERLANDS BV·Filed 2018·Granted Apr 2, 2024·1 cites·22 claims
- 1476US11347142B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2021·Granted May 31, 2022·0 cites·20 claims
- 1575US11754918B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2021·Granted Sep 12, 2023·0 cites·24 claims
- 1675US2024302736A1Pellicle for euv lithographyASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 1774US11314163B2Pellicle frame and pellicle assemblyASML NETHERLANDS BV·Filed 2018·Granted Apr 26, 2022·1 cites·20 claims
- 1871US12298663B2Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicleASML NETHERLANDS BV·Filed 2016·Granted May 13, 2025·1 cites·20 claims
- 1971US11762281B2Membrane for EUV lithographyASML NETHERLANDS BV·Filed 2020·Granted Sep 19, 2023·0 cites·20 claims
- 2059US11977326B2Pellicle for EUV lithographyASML NETHERLANDS BV·Filed 2019·Granted May 7, 2024·0 cites·20 claims
- 2148US11287752B2Cooling apparatus and plasma-cleaning station for cooling apparatusASML NETHERLANDS BV·Filed 2018·Granted Mar 29, 2022·0 cites·20 claims
- 2248US10976196B2Sensor mark and a method of manufacturing a sensor markASML NETHERLANDS BV·Filed 2018·Granted Apr 13, 2021·0 cites·20 claims
- 2347US11143975B2Lithographic apparatus comprising an object with an upper layer having improved resistance to peeling offASML NETHERLANDS BV·Filed 2017·Granted Oct 12, 2021·0 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →