Inventor · disambiguated record
Marwene Nefzi
Also filed as: NEFZI MARWENE · NEFZI MARWÈNE
11 granted patents·6 pending applications·11 citations·filing 2016–2025
82Inventor score
Files withZEISS CARL SMT GMBH17
Top patents by PatentIndex Score
17 records- 0195US11415895B2Compensation of creep effects in an imaging deviceZEISS CARL SMT GMBH·Filed 2021·Granted Aug 16, 2022·4 cites·20 claims
- 0278US10095126B2Moveably mounted component of projection exposure system, as well as device and method for movement limitation for sameZEISS CARL SMT GMBH·Filed 2017·Granted Oct 9, 2018·2 cites·21 claims
- 0374US10416570B2Optical imaging arrangement with a piezoelectric deviceZEISS CARL SMT GMBH·Filed 2018·Granted Sep 17, 2019·3 cites·20 claims
- 0470US12332576B2Method for maintaining a projection exposure apparatus, service module and arrangement for semiconductor lithographyZEISS CARL SMT GMBH·Filed 2022·Granted Jun 17, 2025·0 cites·22 claims
- 0567US2025216797A1Optical element for a projection exposure system, optical system comprising same and projection exposure system comprising the optical element and/or the optical systemZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0666US10809636B2Optical arrangement, in particular lithography systemZEISS CARL SMT GMBH·Filed 2019·Granted Oct 20, 2020·2 cites·20 claims
- 0766US2025298217A1Mirror socket, optical system and projection exposure apparatusZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0862US12287587B2Damping arrangement for vibration damping of an element in an optical systemZEISS CARL SMT GMBH·Filed 2022·Granted Apr 29, 2025·0 cites·22 claims
- 0962US2024160113A1Method for operating an optical systemZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 1059US10989897B2Optical element for the beam guidance of imaging light in projection lithographyZEISS CARL SMT GMBH·Filed 2020·Granted Apr 27, 2021·0 cites·20 claims
- 1158US2024176249A1Optical element, projection optical unit and projection exposure apparatusZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 1255US11526089B2Compensation of creep effects in an imaging deviceZEISS CARL SMT GMBH·Filed 2021·Granted Dec 13, 2022·0 cites·22 claims
- 1354US2023185080A1Optical element, optical arrangement, and method for manufacturing an optical elementZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 1452US10761436B2Optical arrangement, in particular lithography system, with a transport lockZEISS CARL SMT GMBH·Filed 2019·Granted Sep 1, 2020·0 cites·20 claims
- 1549US11703770B2Compensation of creep effects in an imaging deviceZEISS CARL SMT GMBH·Filed 2021·Granted Jul 18, 2023·0 cites·22 claims
- 1648US2021405358A1Compensation of creep effects in an imaging deviceZEISS CARL SMT GMBH·Filed 2021·Application pending·0 cites
- 1740US9632421B2Arrangement and lithography apparatus with arrangementZEISS CARL SMT GMBH·Filed 2016·Granted Apr 25, 2017·0 cites·25 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →