Inventor · disambiguated record
Mark Nokes
Also filed as: NOKES MARK · NOKES MARK A
6 granted patents·159 citations·filing 1990–2008
84Inventor score
Top patents by PatentIndex Score
6 records- 0186US5132548AHigh sensitivity, large detection area particle sensor for vacuum applicationsHIGH YIELD TECHNOLOGY·Filed 1990·Granted Jul 21, 1992·75 cites·8 claims
- 0277US6999183B2Detection system for nanometer scale topographic measurements of reflective surfacesKLA TENCOR CORP·Filed 1998·Granted Feb 14, 2006·40 cites·40 claims
- 0373US8384903B2Detection system for nanometer scale topographic measurements of reflective surfacesKLA TENCOR CORP·Filed 2008·Granted Feb 26, 2013·3 cites·20 claims
- 0466US5266798AHigh sensitivity, large detection area particle sensor for vacuum applicationsHIGH YIELD TECHNOLOGY·Filed 1991·Granted Nov 30, 1993·31 cites·7 claims
- 0553US7342672B2Detection system for nanometer scale topographic measurements of reflective surfacesKLA TENCOR CORP·Filed 2005·Granted Mar 11, 2008·0 cites·18 claims
- 0649US5212580ALow cost stage for raster scanning of semiconductor wafersHIGH YIELD TECHNOLOGY·Filed 1992·Granted May 18, 1993·10 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →