Inventor · disambiguated record
Masahiro Numakura
Also filed as: NUMAKURA MASAHIRO
14 granted patents·3 pending applications·584 citations·filing 2002–2023
91Inventor score
Top patents by PatentIndex Score
17 records- 0197US8055378B2Device for controlling processing system, method for controlling processing system and computer-readable storage medium stored processing programTOKYO ELECTRON LTD·Filed 2008·Granted Nov 8, 2011·540 cites·15 claims
- 0286US11735448B2Container, container partition plate, substrate processing system, and substrate transfer methodTOKYO ELECTRON LTD·Filed 2020·Granted Aug 22, 2023·2 cites·10 claims
- 0379US7640072B2Substrate processing apparatus, control method for the apparatus, and program for implementing the methodTOKYO ELECTRON LTD·Filed 2008·Granted Dec 29, 2009·6 cites·6 claims
- 0475US7738987B2Device and method for controlling substrate processing apparatusTOKYO ELECTRON LTD·Filed 2007·Granted Jun 15, 2010·5 cites·20 claims
- 0572US8571703B2System, method and storage medium for controlling a processing systemNUMAKURA MASAHIRO·Filed 2008·Granted Oct 29, 2013·5 cites·12 claims
- 0670US8731698B2Substrate receiving method and controllerONODERA SHINOBU·Filed 2010·Granted May 20, 2014·5 cites·10 claims
- 0767US2023290660A1Container, container partition plate, substrate processing system, and substrate transfer methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0866US7455747B2Substrate processing apparatus, control method for the apparatus, and program for implementing the methodTOKYO ELECTRON LTD·Filed 2004·Granted Nov 25, 2008·9 cites·3 claims
- 0965US8382910B2Cleaning method for substrate processing system, storage medium, and substrate processing systemTOKYO ELECTRON LTD·Filed 2009·Granted Feb 26, 2013·2 cites·9 claims
- 1064US8452455B2Control device and control method of plasma processing system, and storage medium storing control programMOCHIZUKI HIROAKI·Filed 2009·Granted May 28, 2013·1 cites·20 claims
- 1161US9305814B2Method of inspecting substrate processing apparatus and storage medium storing inspection program for executing the methodNUMAKURA MASAHIRO·Filed 2005·Granted Apr 5, 2016·2 cites·6 claims
- 1259US8145339B2Substrate processing apparatus and substrate transfer method adopted thereinIIJIMA KIYOHITO·Filed 2009·Granted Mar 27, 2012·2 cites·11 claims
- 1356US7367769B2Semiconductor production system, cluster tool, control method of semiconductor production system and maintenance method of cluster toolTOKYO ELECTRON LTD·Filed 2002·Granted May 6, 2008·5 cites·2 claims
- 1448US2010089423A1Cleaning method and storage mediumTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 1543US12444632B2System of processing substrate, transfer method, transfer program, and holderTOKYO ELECTRON LTD·Filed 2019·Granted Oct 14, 2025·0 cites·14 claims
- 1639US2005129839A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 1736US9824861B2Substrate processing apparatus, substrate processing method and recording medium recording substrate processing programTOKYO ELECTRON LTD·Filed 2015·Granted Nov 21, 2017·0 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →