Inventor · disambiguated record
Mária Péter
Also filed as: PETER MARIA · PÉTER MÀRIA
28 granted patents·2 pending applications·88 citations·filing 2008–2024
95Inventor score
Files withASML NETHERLANDS BV24PETER MARIA2DE LAAT WILHELMUS JOHANNES MARIA1MEINDERS ERWIN RINALDO1TACKEN ROLAND ANTHONY1
Top patents by PatentIndex Score
30 records- 0197US10228615B2Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membraneASML NETHERLANDS BV·Filed 2015·Granted Mar 12, 2019·17 cites·28 claims
- 0296US10983431B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2019·Granted Apr 20, 2021·5 cites·20 claims
- 0396US10698312B2Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membraneASML NETHERLANDS BV·Filed 2019·Granted Jun 30, 2020·8 cites·23 claims
- 0493US11971654B2Metal-silicide-nitridation for stress reductionASML NETHERLANDS BV·Filed 2023·Granted Apr 30, 2024·1 cites·20 claims
- 0593US10466585B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2016·Granted Nov 5, 2019·4 cites·20 claims
- 0692US11287737B2Metal-silicide-nitridation for stress reductionASML NETHERLANDS BV·Filed 2018·Granted Mar 29, 2022·5 cites·20 claims
- 0790US11686997B2Metal-silicide-nitridation for stress reductionASML NETHERLANDS BV·Filed 2022·Granted Jun 27, 2023·1 cites·20 claims
- 0889US11467486B2Graphene pellicle lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Oct 11, 2022·4 cites·21 claims
- 0988US10908496B2Membrane for EUV lithographyASML NETHERLANDS BV·Filed 2017·Granted Feb 2, 2021·3 cites·20 claims
- 1087US11320731B2Membrane for EUV lithographyASML NETHERLANDS BV·Filed 2016·Granted May 3, 2022·3 cites·22 claims
- 1187US8895438B2Method for forming a multi-level surface on a substrate with areas of different wettability and a semiconductor device having the samePETER MARIA·Filed 2009·Granted Nov 25, 2014·11 cites·20 claims
- 1284US9065016B2Method for manufacturing a thermoelectric generatorPETER MARIA·Filed 2009·Granted Jun 23, 2015·16 cites·10 claims
- 1382US12117726B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2023·Granted Oct 15, 2024·0 cites·20 claims
- 1482US10712656B2Method for manufacturing a membrane assemblyASML NETHERLANDS BV·Filed 2016·Granted Jul 14, 2020·4 cites·21 claims
- 1581US2024302734A1Metal-silicide-nitridation for stress reductionASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 1680US12066758B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2022·Granted Aug 20, 2024·0 cites·20 claims
- 1779US11231646B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2018·Granted Jan 25, 2022·1 cites·20 claims
- 1878US12474629B2Membrane for EUV lithographyASML NETHERLANDS BV·Filed 2023·Granted Nov 18, 2025·0 cites·20 claims
- 1976US11947256B2Simultaneous double-side coating of multilayer graphene pellicle by local thermal processingASML NETHERLANDS BV·Filed 2018·Granted Apr 2, 2024·1 cites·22 claims
- 2076US11347142B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2021·Granted May 31, 2022·0 cites·20 claims
- 2175US11754918B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2021·Granted Sep 12, 2023·0 cites·24 claims
- 2274US11314163B2Pellicle frame and pellicle assemblyASML NETHERLANDS BV·Filed 2018·Granted Apr 26, 2022·1 cites·20 claims
- 2371US12298663B2Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicleASML NETHERLANDS BV·Filed 2016·Granted May 13, 2025·1 cites·20 claims
- 2471US11762281B2Membrane for EUV lithographyASML NETHERLANDS BV·Filed 2020·Granted Sep 19, 2023·0 cites·20 claims
- 2567US8029973B2Lithographic method and carrier substrateASML NETHERLANDS BV·Filed 2008·Granted Oct 4, 2011·2 cites·16 claims
- 2657US8570491B2System for patterning flexible foilsMEINDERS ERWIN RINALDO·Filed 2009·Granted Oct 29, 2013·0 cites·19 claims
- 2757US2011240350A1Providing a plastic substrate with a metallic patternTNO·Filed 2009·Application pending·0 cites
- 2850US11036128B2Membrane assemblyASML NETHERLANDS BV·Filed 2016·Granted Jun 15, 2021·0 cites·20 claims
- 2942US9383195B2Lithographic apparatus and methodDE LAAT WILHELMUS JOHANNES MARIA·Filed 2008·Granted Jul 5, 2016·0 cites·21 claims
- 3042US9000303B2Method for preparing a patterned electric circuitTACKEN ROLAND ANTHONY·Filed 2008·Granted Apr 7, 2015·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →