Inventor · disambiguated record
Maxim Pisarenco
Also filed as: PISARENCO MAXIM
23 granted patents·20 pending applications·38 citations·filing 2012–2025
93Inventor score
Top patents by PatentIndex Score
43 records- 0195US10146140B2Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Dec 4, 2018·8 cites·13 claims
- 0290US9939250B2Methods and apparatus for calculating electromagnetic scattering properties of a structure and for estimation of geometrical and material parameters thereofASML NETHERLANDS BV·Filed 2014·Granted Apr 10, 2018·7 cites·14 claims
- 0389US12332573B2Method for determining defectiveness of pattern based on after development imageASML NETHERLANDS BV·Filed 2020·Granted Jun 17, 2025·3 cites·15 claims
- 0487US12259659B2Aligning a distorted imageASML NETHERLANDS BV·Filed 2022·Granted Mar 25, 2025·1 cites·15 claims
- 0584US12321101B2Method for applying a deposition model in a semiconductor manufacturing processASML NETHERLANDS BV·Filed 2020·Granted Jun 3, 2025·2 cites·20 claims
- 0684US10845304B2Scatterometer and method of scatterometry using acoustic radiationASML NETHERLANDS BV·Filed 2018·Granted Nov 24, 2020·2 cites·12 claims
- 0782US11378891B2Method for determining contribution to a fingerprintASML NETHERLANDS BV·Filed 2020·Granted Jul 5, 2022·1 cites·20 claims
- 0880US11041816B2Methods and apparatus for calculating electromagnetic scattering properties of a structure and for reconstruction of approximate structuresASML NETHERLANDS BV·Filed 2017·Granted Jun 22, 2021·2 cites·20 claims
- 0979US10816904B2Method for determining contribution to a fingerprintASML NETHERLANDS BV·Filed 2018·Granted Oct 27, 2020·2 cites·26 claims
- 1079US10649345B2Methods and apparatuses for measurement of a parameter of a feature fabricated on a substrateASML NETHERLANDS BV·Filed 2018·Granted May 12, 2020·1 cites·20 claims
- 1179US10444638B2Method for parameter determination and apparatus thereofASML NETHERLANDS BV·Filed 2018·Granted Oct 15, 2019·1 cites·13 claims
- 1278US12271114B2Method and apparatus for predicting substrate imageASML NETHERLANDS BV·Filed 2020·Granted Apr 8, 2025·1 cites·20 claims
- 1378US2025391010A1System and method for generating predictive images for wafer inspection using machine learningASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 1477US11067901B2Method and apparatus for image analysisASML NETHERLANDS BV·Filed 2017·Granted Jul 20, 2021·1 cites·20 claims
- 1576US12204252B2Method for decision making in a semiconductor manufacturing processASML NETHERLANDS BV·Filed 2023·Granted Jan 21, 2025·0 cites·20 claims
- 1676US11687007B2Method for decision making in a semiconductor manufacturing processASML NETHERLANDS BV·Filed 2020·Granted Jun 27, 2023·1 cites·20 claims
- 1775US12493247B2Method and system for predicting process information with a parameterized modelASML NETHERLANDS BV·Filed 2020·Granted Dec 9, 2025·1 cites·13 claims
- 1875US10607334B2Method and apparatus for image analysisASML NETHERLANDS BV·Filed 2015·Granted Mar 31, 2020·2 cites·20 claims
- 1970US11536654B2Scatterometer and method of scatterometry using acoustic radiationASML NETHERLANDS BV·Filed 2020·Granted Dec 27, 2022·0 cites·20 claims
- 2068US10592618B2Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Mar 17, 2020·1 cites·20 claims
- 2167US2022342319A1Method for determining contribution to a fingerprintASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 2265US2025237967A1Method for determining defectiveness of pattern based on after development imageASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 2365US2025103964A1Training a model to generate predictive dataASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 2462US8875078B2Reference library generation method for methods of inspection, inspection apparatus and lithographic apparatusPISARENCO MAXIM·Filed 2012·Granted Oct 28, 2014·1 cites·15 claims
- 2560US11429763B2Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Aug 30, 2022·0 cites·20 claims
- 2660US2024233305A1Aligning a distorted imageASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 2759US2025284191A1Deep learning models for determining mask designs associated with semiconductor manufacturingASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 2856US11347151B2Methods and apparatus for calculating electromagnetic scattering properties of a structureASML NETHERLANDS BV·Filed 2019·Granted May 31, 2022·0 cites·15 claims
- 2955US2025147436A1Methods of metrologyASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 3055US2024369944A1Method for determining a stochastic metric relating to a lithographic processASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 3154US2025003899A1Method and system of image analysis and critical dimension matching for charged-particle inspection apparatusASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 3254US2023267711A1Apparatus and method for selecting informative patterns for training machine learning modelsASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 3353US2025199419A1Methods of metrology and associated devicesASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 3453US2024320528A1Metrology target optimizationASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 3553US2021286270A1Method for decreasing uncertainty in machine learning model predictionsASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 3652US2024020961A1Machine learning based image generation of after-development or after-etch imagesASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 3751US2023021320A1Removing an artifact from an imageASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 3851US2024152060A1Method and system for predicting process information with a parameterized modelASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 3950US2022335290A1Method for increasing certainty in parameterized model predictionsASML NETHERLANDS BV·Filed 2020·Application pending·0 cites
- 4048US2021174491A1Hidden defect detection and epe estimation based on the extracted 3d information from e-beam imagesASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 4148US2023081821A1Method for predicting stochastic contributorsASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 4243US2024062356A1Data-driven prediction and identification of failure modes based on wafer-level analysis and root cause analysis for semiconductor processingASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 4338US10408753B2Method and apparatus for calculating electromagnetic scattering properties of finite periodic structuresPISARENCO MAXIM·Filed 2012·Granted Sep 10, 2019·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →