Inventor · disambiguated record
Matthew A. Purdy
Also filed as: PURDY MATTHEW · PURDY MATTHEW A
36 granted patents·1 pending application·846 citations·filing 2000–2009
98Inventor score
Files withADVANCED MICRO DEVICES INC32GLOBALFOUNDRIES INC1GOOD RICHARD1MAX RACK INC1PURDY MATTHEW A1
Top patents by PatentIndex Score
37 records- 0196US6245581B1Method and apparatus for control of critical dimension using feedback etch controlADVANCED MICRO DEVICES INC·Filed 2000·Granted Jun 12, 2001·204 cites·26 claims
- 0293US6708129B1Method and apparatus for wafer-to-wafer control with partial measurement dataADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 16, 2004·69 cites·27 claims
- 0392US6988045B2Dynamic metrology sampling methods, and system for performing sameADVANCED MICRO DEVICES INC·Filed 2003·Granted Jan 17, 2006·63 cites·32 claims
- 0490US7460968B1Method and apparatus for selecting wafers for samplingADVANCED MICRO DEVICES INC·Filed 2005·Granted Dec 2, 2008·15 cites·25 claims
- 0590US6133132AMethod for controlling transistor spacer widthADVANCED MICRO DEVICES INC·Filed 2000·Granted Oct 17, 2000·46 cites·15 claims
- 0689US7067333B1Method and apparatus for implementing competing control modelsADVANCED MICRO DEVICES INC·Filed 2002·Granted Jun 27, 2006·50 cites·23 claims
- 0786US7100081B1Method and apparatus for fault classification based on residual vectorsADVANCED MICRO DEVICES INC·Filed 2003·Granted Aug 29, 2006·26 cites·42 claims
- 0886US6728591B1Method and apparatus for run-to-run control of trench profilesADVANCED MICRO DEVICES INC·Filed 2001·Granted Apr 27, 2004·37 cites·27 claims
- 0986US6639663B1Method and apparatus for detecting processing faults using scatterometry measurementsADVANCED MICRO DEVICES INC·Filed 2001·Granted Oct 28, 2003·28 cites·14 claims
- 1082US7153709B1Method and apparatus for calibrating degradable components using process state dataADVANCED MICRO DEVICES INC·Filed 2004·Granted Dec 26, 2006·24 cites·23 claims
- 1182US6740534B1Determination of a process flow based upon fault detection analysisADVANCED MICRO DEVICES INC·Filed 2002·Granted May 25, 2004·34 cites·16 claims
- 1281US6790686B1Method and apparatus for integrating dispatch and process control actionsADVANCED MICRO DEVICES INC·Filed 2002·Granted Sep 14, 2004·31 cites·25 claims
- 1380US6409879B1System for controlling transistor spacer widthADVANCED MICRO DEVICES INC·Filed 2000·Granted Jun 25, 2002·21 cites·11 claims
- 1479US6978189B1Matching data related to multiple metrology toolsADVANCED MICRO DEVICES INC·Filed 2002·Granted Dec 20, 2005·21 cites·34 claims
- 1579US6871114B1Updating process controller based upon fault detection analysisFiled 2002·Granted Mar 22, 2005·25 cites·37 claims
- 1676US6365481B1Isotropic resistor protect etch to aid in residue removalADVANCED MICRO DEVICES INC·Filed 2000·Granted Apr 2, 2002·18 cites·20 claims
- 1775US7131937B2Standing weightlifting apparatusMAX RACK INC·Filed 2001·Granted Nov 7, 2006·30 cites·20 claims
- 1873US7296103B1Method and system for dynamically selecting wafer lots for metrology processingADVANCED MICRO DEVICES INC·Filed 2004·Granted Nov 13, 2007·18 cites·22 claims
- 1969US7299106B1Method and apparatus for scheduling metrology based on a jeopardy countADVANCED MICRO DEVICES INC·Filed 2005·Granted Nov 20, 2007·2 cites·23 claims
- 2069US7076321B2Method and system for dynamically adjusting metrology sampling based upon available metrology capacityADVANCED MICRO DEVICES INC·Filed 2004·Granted Jul 11, 2006·11 cites·27 claims
- 2167US6991945B1Fault detection spanning multiple processesADVANCED MICRO DEVICES INC·Filed 2002·Granted Jan 31, 2006·11 cites·21 claims
- 2267US6912436B1Prioritizing an application of correction in a multi-input control systemADVANCED MICRO DEVICES INC·Filed 2002·Granted Jun 28, 2005·12 cites·37 claims
- 2366US7849366B1Method and apparatus for predicting yield parameters based on fault classificationADVANCED MICRO DEVICES INC·Filed 2004·Granted Dec 7, 2010·5 cites·24 claims
- 2466US6562635B1Method of controlling metal etch processes, and system for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2002·Granted May 13, 2003·10 cites·57 claims
- 2562US7069103B1Controlling cumulative wafer effectsADVANCED MICRO DEVICES INC·Filed 2002·Granted Jun 27, 2006·4 cites·22 claims
- 2662US6988225B1Verifying a fault detection result based on a process control stateADVANCED MICRO DEVICES INC·Filed 2002·Granted Jan 17, 2006·8 cites·28 claims
- 2757US6734088B1Control of two-step gate etch processADVANCED MICRO DEVICES INC·Filed 2000·Granted May 11, 2004·8 cites·11 claims
- 2849US8676538B2Adjusting weighting of a parameter relating to fault detection based on a detected faultPURDY MATTHEW A·Filed 2004·Granted Mar 18, 2014·4 cites·31 claims
- 2949US7473566B1Method and apparatus for controlling a film formation process with multiple objectivesADVANCED MICRO DEVICES INC·Filed 2004·Granted Jan 6, 2009·2 cites·17 claims
- 3049US6967068B1Method of controlling stepper process parameters based upon optical properties of incoming anti-reflecting coating layers, and system for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 22, 2005·2 cites·33 claims
- 3149US6555397B1Dry isotropic removal of inorganic anti-reflective coating after poly gate etchingADVANCED MICRO DEVICES INC·Filed 2000·Granted Apr 29, 2003·4 cites·12 claims
- 3248US7715941B1Method and apparatus for scheduling a plurality of processing toolsADVANCED MICRO DEVICES INC·Filed 2004·Granted May 11, 2010·2 cites·28 claims
- 3348US2009276075A1Method and system for monitoring a predicted product quality distributionGOOD RICHARD·Filed 2009·Application pending·0 cites
- 3447US7026170B1Methods of controlling optical properties of a capping insulating layer on memory devices, and system for performing sameADVANCED MICRO DEVICES INC·Filed 2003·Granted Apr 11, 2006·1 cites·77 claims
- 3544US7069098B2Method and system for prioritizing material to clear exception conditionsADVANCED MICRO DEVICES INC·Filed 2004·Granted Jun 27, 2006·0 cites·30 claims
- 3642US7695986B1Method and apparatus for modifying process selectivities based on process state informationGLOBALFOUNDRIES INC·Filed 2005·Granted Apr 13, 2010·0 cites·14 claims
- 3742US6790752B1Methods of controlling VSS implants on memory devices, and system for performing sameADVANCED MICRO DEVICES INC·Filed 2003·Granted Sep 14, 2004·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →