Inventor · disambiguated record
Mark L. Reath
Also filed as: REATH MARK L · Reath Mark
4 granted patents·2 pending applications·33 citations·filing 2001–2016
72Inventor score
Top patents by PatentIndex Score
6 records- 0183US7864502B2In situ monitoring of wafer charge distribution in plasma processingIBM·Filed 2007·Granted Jan 4, 2011·17 cites·27 claims
- 0278US8634949B2Manufacturing management using tool operating dataBARKER BRIAN C·Filed 2010·Granted Jan 21, 2014·8 cites·20 claims
- 0359US7094614B2In-situ monitoring of chemical vapor deposition process by mass spectrometryIBM·Filed 2001·Granted Aug 22, 2006·8 cites·9 claims
- 0443US2009078562A1Method of system maintenance planning based on continual robot parameter monitoringIBM·Filed 2007·Application pending·0 cites
- 0541US2010014748A1Method and apparatus for real time fault detection in high speed semiconductor processesIBM·Filed 2008·Application pending·0 cites
- 0629US10186439B2Systems and methods for sensing process parameters during semiconductor device fabricationGLOBALFOUNDRIES INC·Filed 2016·Granted Jan 22, 2019·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →