Inventor · disambiguated record
Matthew A. Rigsby
Also filed as: RIGSBY MATTHEW A
3 granted patents·2 pending applications·7 citations·filing 2014–2020
59Inventor score
Files withLAM RES CORP5
Top patents by PatentIndex Score
5 records- 0182US9777386B2Chemistry additives and process for cobalt film electrodepositionLAM RES CORP·Filed 2015·Granted Oct 3, 2017·5 cites·22 claims
- 0273US10329683B2Process for optimizing cobalt electrofill using sacrificial oxidantsLAM RES CORP·Filed 2016·Granted Jun 25, 2019·2 cites·9 claims
- 0353US11078591B2Process for optimizing cobalt electrofill using sacrificial oxidantsLAM RES CORP·Filed 2019·Granted Aug 3, 2021·0 cites·11 claims
- 0441US2022102209A1Electrodeposition of cobalt tungsten filmsLAM RES CORP·Filed 2020·Application pending·0 cites
- 0541US2015299886A1Method and apparatus for preparing a substrate with a semi-noble metal layerLAM RES CORP·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →