Inventor · disambiguated record
Matthias Roos
Also filed as: ROOS MATTHIAS
3 granted patents·5 citations·filing 2017–2019
56Inventor score
Files withZEISS CARL SMT GMBH3
Top patents by PatentIndex Score
3 records- 0189US10241421B2Vacuum system, in particular EUV lithography system, and optical elementZEISS CARL SMT GMBH·Filed 2017·Granted Mar 26, 2019·5 cites·8 claims
- 0259US10599052B2Vacuum system, in particular EUV lithography system, and optical elementZEISS CARL SMT GMBH·Filed 2019·Granted Mar 24, 2020·0 cites·10 claims
- 0338US9952519B2Vacuum linear feed-through and vacuum system having said vacuum linear feed-throughZEISS CARL SMT GMBH·Filed 2017·Granted Apr 24, 2018·0 cites·13 claims
Join the waitlist — get patent alerts
Get an alert when Matthias Roos files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →