Inventor · disambiguated record

Manjunath Satyadevan

Also filed as: SATYADEVAN MANJUNATH

1 granted patent·1 pending application·0 citations·filing 2019–2023

5Inventor score

Technology areasC23C H10P

Files withLAM RES CORP2

Top patents by PatentIndex Score

2 records

0156US2025019830A1Preventing deposition on pedestal in semiconductor substrate processingLAM RES CORP·Filed 2023·Application pending·0 cites
0239US11725285B2Preventing deposition on pedestal in semiconductor substrate processingLAM RES CORP·Filed 2019·Granted Aug 15, 2023·0 cites·10 claims

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