Inventor · disambiguated record
Masahiro Shibamoto
Also filed as: SHIBAMOTO MASAHIRO
19 granted patents·11 pending applications·44 citations·filing 2002–2025
90Inventor score
Files withCANON ANELVA CORP21ANELVA CORP5YAMANAKA KAZUTO2SEVEN DREAMERS LABORATORIES INC1SHIBAMOTO MASAHIRO1
Top patents by PatentIndex Score
30 records- 0184US11289305B2Deposition method and deposition apparatusCANON ANELVA CORP·Filed 2020·Granted Mar 29, 2022·2 cites·12 claims
- 0284US7935187B2Film forming apparatusANELVA CORP·Filed 2008·Granted May 3, 2011·4 cites·12 claims
- 0383US6740209B2Multilayer film deposition apparatus, and method and apparatus for manufacturing perpendicular-magnetic-recording mediaANELVA CORP·Filed 2002·Granted May 25, 2004·23 cites·21 claims
- 0477US2025372503A1Laminated body and laminated body manufacturing methodCANON ANELVA CORP·Filed 2025·Application pending·0 cites
- 0575US8053747B2Substrate processing apparatus and cleaning method of the sameCANON ANELVA CORP·Filed 2009·Granted Nov 8, 2011·3 cites·10 claims
- 0674US7625450B2Film forming apparatusCANON ANELVA CORP·Filed 2004·Granted Dec 1, 2009·9 cites·13 claims
- 0770US12438075B2Method for manufacturing a laminated bodyCANON ANELVA CORP·Filed 2023·Granted Oct 7, 2025·0 cites·9 claims
- 0869US8715417B2Film forming apparatusCANON ANELVA CORP·Filed 2013·Granted May 6, 2014·0 cites·5 claims
- 0964US8377210B2Film forming apparatusANELVA CORP·Filed 2011·Granted Feb 19, 2013·0 cites·1 claims
- 1061US2008217170A1Sputtering systemCANON ANELVA CORP·Filed 2008·Application pending·0 cites
- 1158US2009169923A1Substrate processing using the vapor supplying apparatusCANON ANELVA CORP·Filed 2008·Application pending·0 cites
- 1255US7115191B2Magnetic recording disk, magnetic recording disk manufacturing method and magnetic recording disk manufacturing systemANELVA CORP·Filed 2002·Granted Oct 3, 2006·3 cites·5 claims
- 1355US2009134010A1Sputtering apparatus and sputtering methodCANON ANELVA CORP·Filed 2008·Application pending·0 cites
- 1451US8281740B2Substrate processing apparatus, and magnetic recording medium manufacturing methodYAMANAKA KAZUTO·Filed 2009·Granted Oct 9, 2012·0 cites·3 claims
- 1550US8601978B2Substrate processing apparatus, and magnetic recording medium manufacturing methodYAMANAKA KAZUTO·Filed 2009·Granted Dec 10, 2013·0 cites·5 claims
- 1649US10626494B2Plasma CVD apparatus and vacuum treatment apparatusCANON ANELVA CORP·Filed 2013·Granted Apr 21, 2020·0 cites·11 claims
- 1749US7517438B2Magnetic recording disk, magnetic recording disk manufacturing method and magnetic recording disk manufacturing systemCANON ANELVA CORP·Filed 2005·Granted Apr 14, 2009·0 cites·19 claims
- 1848US2009134012A1Sputtering apparatus and sputtering methodCANON ANELVA CORP·Filed 2008·Application pending·0 cites
- 1947US10011899B2Deposition apparatusCANON ANELVA CORP·Filed 2015·Granted Jul 3, 2018·0 cites·7 claims
- 2046US11600295B2Vacuum process apparatus and vacuum process methodCANON ANELVA CORP·Filed 2016·Granted Mar 7, 2023·0 cites·4 claims
- 2145US10971332B2Plasma processing apparatus and plasma processing methodCANON ANELVA CORP·Filed 2020·Granted Apr 6, 2021·0 cites·10 claims
- 2245US8956515B2Multilayer-film sputtering apparatus and method of forming multilayer filmSHIBAMOTO MASAHIRO·Filed 2011·Granted Feb 17, 2015·0 cites·7 claims
- 2344US10917960B2Deposition apparatusCANON ANELVA CORP·Filed 2016·Granted Feb 9, 2021·0 cites·17 claims
- 2443US2015348579A1Magnetic recording medium and method for manufacturing the sameCANON ANELVA CORP·Filed 2013·Application pending·0 cites
- 2542US2005011756A1Sputtering systemANELVA CORP·Filed 2004·Application pending·0 cites
- 2642US2015083586A1Deposition apparatusCANON ANELVA CORP·Filed 2014·Application pending·0 cites
- 2737US10731245B2Vacuum arc deposition apparatus and deposition methodCANON ANELVA CORP·Filed 2017·Granted Aug 4, 2020·0 cites·7 claims
- 2836US2018163342A1Processing Apparatus for Processing SubjectSEVEN DREAMERS LABORATORIES INC·Filed 2016·Application pending·0 cites
- 2934US2016056026A1Processing apparatusCANON ANELVA CORP·Filed 2015·Application pending·0 cites
- 3023US2016027624A1Sputtering apparatusCANON ANELVA CORP·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →